3-26
INTEGRA Operations Revision A
7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
The spindle fingers are in the
HOLDING
a wafer orientation at the
TOP
position when the wafer is being transferred to the Unload
Handler. As soon as the handler fingers close on the wafer the
spindle fingers release it, and move to the
OPEN
orientation. The
spindle is lowered to the
MID
position to await another wafer.
Spin Motor
The motor that runs the spindle has adjustable speed so that the
process can be varied according to changing requirements. The
speed adjustment is part of the process recipe which contains nine
“Events” for each spin cycle. This means that the motor speed can be
set to progress through nine different speeds during one process
cycle. (See Chapter 9, Process Recipe.)
Finger Close Safety Spring
The spin fingers are opened and closed by a single, two position air
cylinder. The fingers open as the air cylinder retracts. The finger drive
shaft rotates as it lowers due to the lead screw design of the link
chuck assembly. The rotating shaft acts upon a cam drive nut that
pulls the linkage and opens the fingers. The air cylinder is attached to
the finger drive shaft via a coupling block containing two bearings. A
finger close safety spring mounted between the air cylinder and the
coupling is compressed when the fingers are open. In the event of
power loss, all pneumatic control solenoids return to their normal
state. The spin fingers are kept closed by the safety spring, thus
preventing spinning wafers from being dropped.
Z_Lock
In the absence of a Z_Lock, if a power failure occurs during functions
in the MID or TOP spindle positions, the shaft could fall and cause
damage to the fragile wafers. A pneumatically operated locking
device called the Z_Lock is designed to protect a wafer in the spindle
fingers from breakage in the event of a system failure. The Z_Lock
extends a mechanical stop under an adjustable support bracket at the
TOP and MID level spindle positions, preventing the spindle shaft
from falling in the event of a power failure.
Spindle Lock
In order to ensure proper positioning of the spindle fingers so there
will be no contact or interference with the carriage, there is a spindle
lock mechanism. In the systems which process wafers with flats, the
wafers must be specially oriented in the spindle fingers and the
handler fingers to prevent being dropped or damaged, and to ensure
final orientation in the output cassette. Initial orientation is set by the
flat finder and protected by the spindle lock, which stops the spindle
rotation in precisely the same position it began.
Summary of Contents for Synergy Integra
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