
C h a p t e r 2 S A F E T Y
7/26/00
INTEGRA Operations Revision A
2-11
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
EMO LOCATIONS
B
CAUTION:
Pressing an Integra EMO button powers off the integrated system of
cleaner
and
polisher.
M
AINTENANCE
I
SSUES
Chemical Exposure
Typical chemical exposure levels during maintenance activities
should not exceed 3 ppm (using a pH test strip) if the system is
flushed prior to starting the maintenance procedure. The flush
removes trace amounts of HF (down to 3 ppm max).
The brush box lid can not be opened until a 5-minute flush
procedure is performed.
If any chemical lines are to be disconnected during maintenance, the
system must be purged of chemicals, starting from the chemical
dispense system all the way through the Integra system. The lines
can then be disconnected without hazard of chemical exposure.
Purge Procedure
See Chemical Purge chapter of Maintenance manual.
N2 Purge for Long Term Storage
When an Integra is to be stored or prepared for relocation or
shipment, it should be purged with N2. Follow the N2 Purge
procedure in the appendix of the Maintenance Manual.
EMO
BUTTON
EMO
BUTTON
ULPA FILTER
CIRCUIT
BREAKER
Summary of Contents for Synergy Integra
Page 8: ......
Page 24: ...1 4 INTEGRA Operations Revision A 7 26 00 20 0200 231 CR 20 0200 232 Std 20 0200 251 CD...
Page 38: ...2 14 INTEGRA Operations Revision A 7 26 00 20 0200 231 CR 20 0200 232 Std 20 0200 251 CD...
Page 222: ...9 62 INTEGRA Operations Revision A 7 26 00 20 0200 231 CR 20 0200 232 Std 20 0200 251 CD...
Page 314: ...10 76 INTEGRA Operations Revision A 7 26 00 20 0200 231 CR 20 0200 232 Std 20 0200 251 CD...