ONTRAK Synergy Integra, Operation Manual

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10-58 INTEGRA Operations Revision A 7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
A
LARM
ID: 119
Description: Stop Caused By Wafer Out Of Position In Spin
Station
Posting Program: Spin Station
Alarm Type: Alarm & Sonalert
Reason: The spin fingers have closed on a wafer and the system
detects that the left or right wafer sensor can see the wafer,
indicating that the wafer is out of position in the Spin Station
fingers.
Disposition: The system goes into STOP mode and the operator
must take appropriate action to position the wafer in the spin
fingers or remove the wafer from the Spin Station. Wafer recovery
may be required if the wafer is removed. This alarm can only occur
on systems with
multiple spin wafer sensor software configured.
GEM ALID: 119
GEM Alarm.
A
LARM
ID: 120
Description: Exhaust Baffle: Open State Expected; Baffle Closed
Posting Program: Monitor
Alarm Type: Alarm & Sonalert
Reason: This alarm is only posted on Series IIc, Integra, and
Synergy
systems that use an HF
Brush Station. The exhaust baffle
was closed when the system expected it to be open. The exhaust
baffle must be open, allowing full exhaust of air from the Brush
Station, anytime the Brush Station lid is open.
Disposition: Machine is put into CLEARING mode.
GEM ALID: 120
GEM Alarm.
A
LARM
ID: 121
Description: Exhaust Baffle: Closed State Expected; Baffle Open
Posting Program:
Monitor
Alarm Type: Alarm & Sonalert
ALCD ALTX ON CEID OFF CEID
6 119 Stop caused by Wafer Out Of Position In Spin
Station. 437 438
ALCD ALTX ON CEID OFF CEID
6 120 Exhaust Baffle: Open State Expected; Baffle
CLOSED. 439 440