ONTRAK Synergy Integra, Operation Manual

Page: 43 / 350

C h a p t e r 3 S Y S T E M C O N F I G U R AT I O N
7/26/00 INTEGRA Operations Revision A 3-5
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
INPUT STATION OUTPUTS (Solenoids/Switches)
UPPER LIMIT SENSOR Not used. May display on
screen, but not functional on
Integra cleaner.
n/a
LID CLOSED SENSOR Magnetic Reed Sensor: At the
front of the Input Station lid.
Icon is green when the Input Station lid
is CLOSED to start DI water spray. The
spray stops when the lid is open.
BULKHEAD DOOR
OPEN SENSOR
Flag (Optical) Sensor : On the
upper Input Station’s
Bulkhead Door (Robot Wafer
Door).
Icon is
green
when the Bulkhead Door
(Robot Wafer Door) is open.
BULKHEAD DOOR
CLOSE SENSOR
Flag (Optical) Sensor: On the
lower Input Station’s
Bulkhead Door (Robot Wafer
Door).
Icon is green when the Bulkhead Door
(Robot Wafer Door) is closed.
SENSOR NAME TYPE AND LOCATION FUNCTION
OUTPUT NAME DESCRIPTION
BULKHEAD DOOR
SOLENOID
Solenoid . The solenoid valve activates the pneumatic cylinder that
opens/closes the bulkhead door. The bulkhead door opens to admit
the Input Robot (with wafer) and closes when the Input Robot exits
the Input Station.
Icon Status: Icon is
green
when the door is OPEN and
red
when the
door is CLOSED.
RINSE SOLENOID Solenoid . The solenoid valve turns ON or OFF the DI water to the
wafer spray manifold. The Input Lid Closed sensor interrupts this
output signal when the lid is not closed.
Icon Status: Icon is green when the valve is OPEN and red when the
valve is CLOSED.
TRANSPORT BELT
MOTOR
Motor Controller Circuitry . The relay turns
ON
or
OFF
the wafer
conveyor belt.
Icon Status: Icon is green when the conveyor is
ON
and red when the
conveyor is OFF.