C h a p t e r 1 0 A L A R M S
7/26/00
INTEGRA Operations Revision A
10-23
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
A
LARM
ID: 28
Description:
Brush Station #2 Error Trying To Open Rollers
Posting Program:
Brush 2 Station
Alarm Type:
Alarm & Sonalert
Reason:
This alarm is valid only on systems that have the
Roller
Position
Sensor option installed. The alarm is posted when the
roller solenoids are set to open the rollers but all the
roller position
sensors do not report ‘open’.
Disposition:
The Brush 2 Station program will not continue until
all
roller position
sensors report that the rollers are open.
GEM ALID: 28
GEM Alarm.
A
LARM
ID: 29
Description:
Brush Station #2 Error Trying To Close Rollers To 6
Inch
Posting Program:
Brush 2 Station
Alarm Type:
Alarm & Sonalert
Reason:
This alarm is valid only on systems that have the
Roller
Position
Sensor option installed. The alarm is posted when the
roller solenoids are set to the 6 inch closed position but the
sensors do no report ‘6 Inch closed’ position.
Disposition:
The Brush 2 Station program will not continue until
all
roller position
sensors report that the rollers are closed to the 6
inch position.
GEM ALID: 29
GEM Alarm.
A
LARM
ID: 30
Description:
Brush Station #2 Error Trying To Close Rollers To 8
Inch
Posting Program:
Brush 2 Station
Alarm Type:
Alarm & Sonalert
Reason
: This alarm is valid only on systems that have the
Roller
Position
Sensor option installed. The alarm is posted when the
roller solenoids are set to the 8 inch closed position but the
sensors do no report ‘8 Inch closed’ position.
6
27
Spin Station Wafer Sensor doesn’t see wafer.
255
256
ALCD
ALTX
ON CEID OFF CEID
6
28 Brush Station #2 error trying to open rollers.
257
258
ALCD
ALTX
ON CEID OFF CEID
6
29 Brush #2 error trying to close rollers to 6 inch.
259
260
Summary of Contents for Synergy Integra
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Page 24: ...1 4 INTEGRA Operations Revision A 7 26 00 20 0200 231 CR 20 0200 232 Std 20 0200 251 CD...
Page 38: ...2 14 INTEGRA Operations Revision A 7 26 00 20 0200 231 CR 20 0200 232 Std 20 0200 251 CD...
Page 222: ...9 62 INTEGRA Operations Revision A 7 26 00 20 0200 231 CR 20 0200 232 Std 20 0200 251 CD...
Page 314: ...10 76 INTEGRA Operations Revision A 7 26 00 20 0200 231 CR 20 0200 232 Std 20 0200 251 CD...