ONTRAK Synergy Integra, Operation Manual

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C H A P T E R 1 2
7/26/00 INTEGRA Operations Revision A 12-1
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
12
S Y S T E M S E C U R I T Y
(COMPUTER ACCESS AUTHORIZATION LEVELS)
C H A P T E R 1 0
INTRODUCTION
The Integra system is equipped with a computer which has been
programmed to run the system.
The computer program is further geared to offer three levels of
access to the machine operation. The operators have the most basic
access, with access to perform all necessary tasks related to the
processing of wafers. The next is the engineering access which offers
the ability to use all of the screens designed to alter the actual
processing parameters or “teach” new parameters to various
machine components. The highest level is associated with the
security key. This physical key turns a lock in the instrument panel.
Once activated it offers the same opportunities that the engineering
access does with the added provision of access to the
SECURITY
screen. The
SECURITY
screen affords the opportunity to assign and
delete password access for additional operators, technicians and
maintenance personnel.
UNDERSTANDING MAINTENANCE SECURITY
There are three major aspects of maintenance detailed for the Integra
system: Preventive maintenance (PM); normal adjustments; and
replacement of parts or components. The Maintenance screen may be
accessed through the ENGINEERING (
MAINTENANCE) MENU
button in the
ONTRAK SYSTEMS INC. (MAIN MENU)
screen. The
functional screens associated with the
MAINTENANCE
screen are
protected from unauthorized access. The security required to enter
the
MAINTENANCE
screen is designed to protect the system settings
from being changed by someone who does not fully understand the
consequences of critical adjustments. Numerous machine and
processing adjustments may be accessed and changed through the
MAINTENANCE
screen. Using a
PASSWORD
to access these areas also
provides a degree of protection from tampering for the entire system.