ONTRAK Synergy Integra, Operation Manual

Page: 121 / 350

C h a p t e r 6 S T A R T- U P A F T E R E M O & WA F E R R E C O V E R Y
7/26/00 INTEGRA Operations Revision A 6-3
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
START-UP PROCEDURE AFTER EMO
After an emergency or premature shutdown of the system, it is
extremely important that the person responsible for bringing the
system back up performs all the tasks in the Pre Start-Up Check List.
(See “Pre Start-up Checklist” on page 5-1.)
C
WARNING:
Do not attempt to perform the Start-Up Procedure until the
Preprocessing Procedure has been completed.
Post Emergency (EMO) Start-Up Checklist
STEP PROCEDURE COMMENT
1 Unlock the EMO switch. (If the EMO was
used to stop the processing.)
Locate the EMO key, insert it and turn
counterclockwise to unlock.
2 Turn ON the computer monitor. The cleaner may have the monitor activation
tied to the ON button located on the
Operator Control Panel.
3 Press the
ON
button on the Operator
Control Panel (the left button).
This powers up the system and starts the
system initialization.
4 When the system goes through the
initialization of the various stations,
watch to ensure that all components are
responding properly.
The monitor displays the current station
component being initialized. (See
“Initialization Sequence” on page 5-6.)
5 Acknowledge
all
alarms which may have
occurred prior to or after the shutdown.
(Be sure to resolve each alarm warning
before erasing it. See the section on
WARNINGS and ERRORS.)
Display the SYSTEM STATUS screen. Each
time a warning light comes on, a yellow light
bulb appears at the bottom right side of the
screen and a brief message is displayed in the
CURRENT ALARM box located below the
light bulb. Alarms associated with GEM
messages are displayed in this box.
Only one warning/message is displayed at a
time. It may be necessary to clear the
CURRENT ALARM box several times to read
all the messages.
To clear the current screen message, touch the
yellow light bulb.
6 If the computer displays a LOST WAFERS
message, the operator is asked to verify if
there are wafers in the individual process
stations. (See “Wafer Recovery” on page
6-5.)
Also, when the message displays,
physically verify that wafers are not in the
Input and/or Output Stations tunnels.
Wafers in process stations should be
recovered using the normal lost wafer
recovery procedure.
Wafers in Input and/or Output Stations
tunnels should be recovered using the normal
Input/Output robot lost wafer recovery
procedures.