ONTRAK Synergy Integra, Operation Manual

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C h a p t e r 1 1 G E M C O N F I G U R AT I O N & M E S S A G E S
7/26/00 INTEGRA Operations Revision A 11-11
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
63 InputLoadComplete
SMIF Load sequence has completed at the Input Station.
64 InputUnloadComplete
SMIF Unload sequence has completed at the Input Station.
65 OutputPodArrived
Pod has been placed on the Output Station SMIF.
66 OutputPodRemoved
Pod has been removed from the Output Station SMIF.
67 OutputReadyToLoad
Output Station is ready to load from the SMIF.
68 OutputReadyToUnload
Output Station is ready to unload from the SMIF
69 OutputLoadComplete
A SMIF load sequence has completed at the Output Station.
70 OutputUnloadComplete
A SMIF unload sequence has completed at the Output Station.
71 InputTransfer
Input Station has transfered a wafer to Brush Station #1.
72 SpinTransfer
Spin Station has transfered a wafer to the Unload Handler.
73 OutputTransfer
Unload Handler has placed a wafer in the Output Station.
74 LotEndReceived
Input Station has received a Lot End signal from the polisher.
75 OutputDoorOpen
Sent each time the Output Station door is opened.
76 OutputDoorClosed
Sent each time the Output Station door is closed.
77 OutputDoorLocked
Sent each time the Output Station door is locked.
78 OutputDoorUnlocked
Sent each time the Output Station door is unlocked.
79 InputWaitingStart Input waiting for a Start Resume command or operator pressed Start.
80 InputReceivedStart Input has received a Start Resume command or operator pressed Start.
102 GemBadDownloadEvent
106 GemSpoolingActivated
107 GemSpoolingDeactivated
108 GemSpoolTransmitFailure