4-22
INTEGRA Operations Revision A
7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
Light Tower Option 10
Light Tower Option 11 (not used on Integra)
Notes
: Only one light is active at a time. The Yellow light is never ON. The priority for displaying lights is as
follows:.
Host Turned Light ON.
Alarm Present.
Move-Out Request.
Move-In Request.
Processing.
COLOR
PURPOSE
STATUS
DESCRIPTION
White
System
State
ON
System Down - Machine in PAUSED/CLEARING mode.
OFF
Machine in START/RUNNING (after initialization).
FLASH
N/A
Yellow
Alarm
Status
ON
Alarm present
OFF
Alarm not present.
FLASH
N/A
Green
Running
ON
Processing wafers - wafers in Brush #1, Brush #2 or Spin.
OFF
Not processing wafers.
FLASH
N/A
Blue
Process
Status
ON
Standby - Machine in PAUSED/CLEARING mode.
IDLE STATE - No wafers in Brush #1, Brush #2 or Spin.
OFF
Processing wafers.
FLASH
End-of-Lot, waiting for operator action.
Input cassette empty/Output cassette complete.
COLOR
PURPOSE
STATUS
DESCRIPTION
Red
Alarm
Status
ON
Host turned light ON.
OFF
Alarm is not present and Host turned light OFF.
FLASH
Alarm present
Yellow
Process
Status
ON
N/A
OFF
Move-In complete: Lot in progress.
FLASH
Move-In request (Input Station).
Green
Running
ON
Processing wafers - wafers in Brush #1, Brush #2 or Spin.
OFF
Move-Out complete: Not progressing wafers.
FLASH
Move-Out request (Output Station).
Summary of Contents for Synergy Integra
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