10-20
INTEGRA Operations Revision A
7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
Alarm Type:
Alarm & Sonalert
Reason:
At the end of every Brush Station #1 process event the
actual speed is compared to the program recipe speed. This alarm
condition is posted whenever the actual speed varies from the
programmed speed by more than 10%.
Disposition:
System is put into CLEAR mode.
GEM ALID: 19
GEM Alarm.
A
LARM
ID: 20
(Selectable)
Description:
Brush Station #1 Lower Brush Motor Speed Failure
Posting Program:
Brush 1 Station
Alarm Type:
Alarm & Sonalert
Reason:
This alarm condition is checked at the end of every
Brush Station #1 process event. The alarm is posted whenever
their is a 10% difference between the actual speed and the
programmed speed.
Disposition:
System is put into CLEAR mode.
GEM ALID: 20
GEM Alarm.
A
LARM
ID: 21
Description:
Brush Station #1 Roller Motor Speed Out Of
Specifications
Posting Program:
Brush 1 Station
Alarm Type:
Alarm & Sonalert
Reason:
This alarm condition is checked at the end of every
Brush Station #1 process event. The alarm is posted whenever
their is a 10% difference between the actual speed and the
programmed speed.
Disposition:
The alarm is posted but processing continues.
GEM ALID: 21
GEM Alarm
A
LARM
ID: 22
Description:
Brush Station #2 Waiting On Wafer From Brush
Station #1
ALCD
ALTX
ON CEID OFF CEID
3
19 Brush 1 Upper Brush Motor speed failure.
239
240
ALCD
ALTX
ON CEID OFF CEID
3
20 Brush 1 Upper Lower Motor speed failure.
241
242
ALCD
ALTX
ON CEID OFF CEID
3
21 Brush 1 Upper Roller Motor speed out of spec.
243
244
Summary of Contents for Synergy Integra
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Page 24: ...1 4 INTEGRA Operations Revision A 7 26 00 20 0200 231 CR 20 0200 232 Std 20 0200 251 CD...
Page 38: ...2 14 INTEGRA Operations Revision A 7 26 00 20 0200 231 CR 20 0200 232 Std 20 0200 251 CD...
Page 222: ...9 62 INTEGRA Operations Revision A 7 26 00 20 0200 231 CR 20 0200 232 Std 20 0200 251 CD...
Page 314: ...10 76 INTEGRA Operations Revision A 7 26 00 20 0200 231 CR 20 0200 232 Std 20 0200 251 CD...