ONTRAK Synergy Integra, Operation Manual

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C H A P T E R 2
7/26/00 INTEGRA Operations Revision A 2-1
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
S A F E T Y
2
INTRODUCTION
The safe operation of the Integra is the responsibility of the user. Lam
provides safety information regarding the design of the system and
its proper use. This includes hazards which affect the cleaning
process, the machinery, and the operator. Lam assumes no
responsibility or liability for the safety procedures adopted by the
user nor for the procedures used while operating the Integra system.
It is imperative that all personnel who will operate or maintain the
Integra be fully trained in the safe operating procedures for the
system, and in the related hazards associated with its use and
maintenance. A description of the hazards and a discussion of general
safe practices are included in this manual so that precautions may be
taken to protect against damage to the processing wafers, damage to
or destruction of system components, and personal injury.
Q
WARNING! PINCH POINT:
When the Integra is configured with various input and
output robotic devices, it is the responsibility of the CMP System Integrator to ensure
that the operator is protected from any cleaner input and/or output opening pinch
points. Normal and/or ancillary protection must be provided during wafer handling
when input and output robots are in place
AND when robots are removed and the
cleaner is operational for such activities as installation and maintenance.
This chapter includes general warnings and cautions that apply during
the operation of and servicing of this system. Safety procedures
associated with original equipment manufactures (OEM) components
and options are presented in the sections that deal with their operation.
There are safety advisories throughout the manual. It is the user’s
responsibility to become familiar with the contents of the manual in
order to understand the hazards and how to avoid them.
In general, if the system appears to be malfunctioning, stop the
system and contact the appropriate people (maintenance and
supervision). Once the system has been stopped, do not attempt to
reactivate it until:
1 The situation has been assessed by qualified personnel;
2 Any necessary adjustments or repairs have been completed;
3 The system is released back into operation by the person(s)
responsible for correcting the problem.