ONTRAK Synergy Integra, Operation Manual

Page: 297 / 350

C h a p t e r 1 0 A L A R M S
7/26/00 INTEGRA Operations Revision A 10-59
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
Reason: This alarm is only posted on Series IIc, Synergy, and Integra
systems that use an HF
Brush Station. The exhaust baffle is open
when the system expected it to be closed. The exhaust baffle must
be closed when processing wafers in the Brush Station.
Disposition: . Machine is put into CLEARING mode.
GEM ALID: 121
GEM Alarm.
A
LARM
ID: 122
Description: Timeout Waiting For GEM Take Wafer Remote
Command (RCMD)
Posting Program: Input
Alarm Type: Alarm & Sonalert
Reason:
This alarm is only posted on
Series II (Series IIi)
systems that
use a CMP host with GEM interface. The DSS-200 or Integra has
“timed out” waiting for the CMP host system to issue the GEM
Take Wafer remote command. The GEM Take Wafer remote
command instructs the DSS-200 or Integra to enable the Input
Station’s transfer belt and move the wafer into the Input Station.
The timer for this alarm starts once the Input Door (not Input
Station lid) is opened by the GEM Open Door remote command.
Disposition: When the GEM DSS-200 or Integra handshake
sequence terminates, the Input Door remains open and the Input
Station’s transfer belt returns to an idle state (disabled). The CMP
host system must re-send the GEM Open Door remote command
to restart the timer.
GEM ALID: 122
GEM Alarm.
A
LARM
ID: 123
Description: Timeout Waiting For GEM Close Door Remote
Command (RCMD)
Posting Program: Input
Alarm Type: Alarm & Sonalert
ALCD ALTX ON CEID OFF CEID
6 121 Exhaust Baffle: Closed State Expected; Baffle
OPEN. 441 442
ALCD ALTX ON CEID OFF CEID
6 122 Timeout waiting for GEM “Take Wafer
Remote” command (RCMD). 443 444