7-2
INTEGRA Operations Revision A
7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
SELECT WAFER DIAMETER
The Integra has two wafer diameter settings 150 mm, and 200 mm.
The Integra predominantly uses the 200 mm wafer diameter
(standard), with 150 mm the next most frequently used diameter.
Use the following procedure to select the wafer diameter.
1 From the
MAIN MENU screen
, touch SELECT OPTIONS to
display the
SYSTEM OPTIONS
screen.
2 From the
SYSTEM OPTIONS
screen, touch SELECT WAFER
DIAMETER.
STANDARD
Summary of Contents for Synergy Integra
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