ONTRAK Synergy Integra, Operation Manual, Page: 3 / 350

7/26/00 INTEGRA Operations Revision A iii
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
PREFACE
This manual provides information on safety and operation of the Intergra cleaner.
It is composed of one volume, which contains fifteen chapters of text. The
Operations manual contains seven chapters that are also included in the Maintenance
manual. They are: Chapter 2, Safety; Chapter 11, GEM Configuration; Chapter 12,
System Security; and Chapter 14, Technical Bulletins. Chapter 2, Safety, and Chapter
11, Alarms, are also included in the Troubleshooting manual.
Chapter 1 Introduction , is intended to give those who operate and maintain the Integra
information on the system and a general description of the manuals.
Chapter 2 Safety
,
is intended for everyone using the system. It presents the safety issues that
apply during operation and maintenance of the system.
Chapter 3 System Configuration , is intended for the system operator, process engineer, and
maintenance technician. It describes the mechanical configuration of each module
in the system.
Chapter 4 Process Description
,
is intended to lead the operator through the operating
procedures of the system under normal conditions. This includes system pre–start-
up, start-up, and shutdown.
Chapter 5 Normal Operations , is intended for the system operator, process engineer, and
maintenance technician. It presents a pre–start-up checklist, start-up procedure,
initialization sequence, post–start-up checklist, and clearing and shutdown
procedures.
Chapter 6 Start-up After EMO , is intended to assist the operators and technicians in starting
the system after shutdown by EMO or other premature processing shutdown.
Chapter 7 Optional Process Settings , is intended to lead the operator, technician, and
engineer through the following optional procedures: select wafer diameter,
activate/deactivate flat finder, select process recipe, identify Envoy status, set
maintenance alarms, and set/read brush motor alarm.
Chapter 8 Smooth Wafer Travel Checklist , is intended to assist the operator and technician
to visually determine that the system is correctly cleaning/processing wafers.
Chapter 9 Process Recipe , is intended to assist the operator, technician, and process
engineers to change and view the parameters of a Process Recipe.
Chapter 10 Alarms , is intended to assist the operator and technician by presenting all
available system alarm information. Alarm information includes: description,
posting program, type, reason, disposition, and associated GEM information.
Chapter 11 GEM Configuration
,
is intended for the system operator, process engineer, and
maintenance technician. It describes how to create the GEM interface between the
factory host system and the Integra.
Chapter 12 System Security , is provided to assist the maintenance technician and field
engineer to set/delete password/key security for each operator, technician, and
engineer (maintenance mode).
Chapter 13 Technical Bulletins
,
is provided to store Lam Technical Bulletins (technical,
procedural, process, etc., updates) that are periodically sent to Field Engineers and
customers.