C h a p t e r 3 S Y S T E M C O N F I G U R AT I O N
7/26/00
INTEGRA Operations Revision A
3-21
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
BRUSH STATION #2 OUTPUTS (Solenoids/Switches)
BRUSH LID
UNLOCKED
SENSOR
Hall Effect Sensor
. Located
on the pneumatic cylinder
which operates the Brush
Station lid lock.
Icon is
green
when the lock is disengaged
(unlocked) and
red
when the lock is engaged
(locked). See the NOTE in the BRUSH LID
LOCKED SENSOR description above.
CHEMICAL FLOW
SENSOR
Flow Detector (switch)
.
Located in Chem Drawer
#2, after the chem valve,
and before the flow meter.
Icon is
green
when process chemical pressure
is sufficient for Brush Station #2 and
red
when it is not.
If the system requests chemical and the flow
sensor does not detect sufficient pressure, an
alarm is posted. See “Alarm ID: 134,” on page
10-64 for NH
4
OUTPUT NAMES
DESCRIPTION
TRANSPORT MOTOR
Motor Controller Circuitry.
Toggles
ON and OFF the wafer conveyor
motor in Brush Station #2. Touch TRANSPORT MOTOR to toggle the
Wafer Convey motor ON or OFF.
Icon Status:
Icon is
green
when the motor is
ON
and
red
when it is
OFF
.
BRUSH MOTORS
Motor Controller Circuitry.
Brush Motors are programmable speed
motors. When the BRUSH MOTOR button is touched, a NUMBER
PAD displays so that the desired speed for the Brush #2 brush motor
can be entered. Enter the speed, then touch
ENTER
.
TOGGLE ROLLERS
Motor Controller Circuitry
. Toggles rollers open (i.e, Accept/Release
Wafer) and toggles rollers closed (i.e., Ready For Wafer).
Icon Status:
The top right corner of the screen displays the current
roller configuration.
ROLLER MOTOR
Motor Controller Circuitry.
The roller motor is a programmable speed
motor. When the ROLLER MOTOR button is touched, a NUMBER
PAD screen displays so that the desired speed for the Brush #2 roller
motor can be entered. Enter the speed, then touch
ENTER
.
TEACH ROLLERS
Teach Screen Access
. The roller setting determines the Rollers At Ready
and the Rollers At Process positions. On the SECOND BRUSH
STATION I/O screen, the TEACH ROLLERS button provides access to
a sub screen on which the
roller positions
(teach rollers) may be
adjusted.
TEACH LIFTERS
Teach Screen Access
. The lifter setting determines the height at which the
brushes turn while cleaning a wafer. On the SECOND BRUSH
STATION I/O screen, touch TEACH LIFTERS to display a sub screen.
Enter the
height of the brushes
or use the TEACH LIFTERS button to
adjusted the current lifter height setting.
SENSOR NAME
TYPE AND LOCATION
FUNCTION
Summary of Contents for Synergy Integra
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