C h a p t e r 9 P R O C E S S R E C I P E
7/26/00
INTEGRA Operations Revision A
9-65
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
LAM P/N 35-0005-014
LAM P/N 35-0005-037
250 CC/MIN FLOWMETER - Low Flow Series
FLOW RATE 5-250 CC/MIN in H20 w/Solid Teflon Float
1
2
3
4
5
6
7
8
9
10
MARK 1 - 10
0
25
50
75
100
125
150
175
200
225
250
CC/MIN
0
0.01
0.02
0.03
0.04
0.05
0.06
GPM
ACCURACY
+ 5% FS
500 CC/MIN FLOWMETER
FLOW RATE 90 - 500 CC/MIN in H20
1
2
3
4
5
6
7
8
9
10
MARK 1 - 10
0
50
100
150
200
250
300
350
400
450
500
CC/MIN
0
0.02
0.04
0.06
0.08
0.1
0.12
GPM
ACCURACY
+ 5% FS
Summary of Contents for Synergy Integra
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