C h a p t e r 1 0 A L A R M S
7/26/00
INTEGRA Operations Revision A
10-43
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
Disposition:
The Unload Handler process will not continue until
the
spin carriage retract
sensor reports the carriage in the “retract”
position.
GEM ALID: 79
GEM Alarm.
A
LARM
ID: 80
Description:
Time-out In Unload Looking For Spin Carriage
Extend
Posting Program:
Unload Handler
Alarm Type:
Alarm & Sonalert
Reason:
At start-up, at the end of a wafer recovery operation,
inorder to recover a wafer found in the Unload Handler fingers
into the output cassette, the spin carriage must be extended. If the
spin carriage extend
sensor does not report the carriage actually
being in the “extend” position, the alarm is posted.
Disposition:
The Unload Handler process will not continue until
the
spin carriage extend
sensor is seen.
GEM ALID: 80
GEM Alarm.
A
LARM
ID: 81
Description:
Remove Output Cassette - Press Start
Posting Program:
Output station
Alarm Type:
Alarm & Sonalert
Reason:
This alarm is only valid on systems equipped with the
Output Station SMIF option. If at start-up a cassette is found in
the Output Station, the system tries to use it. If this cassette is told
to come home by the operator, it must be removed in order to
resume normal SMIF operations. This alarm is posted to remind
the operator to remove the cassette.
Disposition:
The system is put into STOP. Normal processing
will resume when the system is put back into RUN.
GEM ALID: 81
GEM Alarm.
ALCD
ALTX
ON CEID OFF CEID
6
79 Time-out in Unload Handler looking for Spin
Carriage Retract Sensor.
359
360
ALCD
ALTX
ON CEID OFF CEID
6
80 Time-out in Unload Handler looking for Spin
Carriage Extend Sensor.
361
362
ALCD
ALTX
ON CEID OFF CEID
6
81 Remove Output Cassette - Press START.
363
364
Summary of Contents for Synergy Integra
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Page 24: ...1 4 INTEGRA Operations Revision A 7 26 00 20 0200 231 CR 20 0200 232 Std 20 0200 251 CD...
Page 38: ...2 14 INTEGRA Operations Revision A 7 26 00 20 0200 231 CR 20 0200 232 Std 20 0200 251 CD...
Page 222: ...9 62 INTEGRA Operations Revision A 7 26 00 20 0200 231 CR 20 0200 232 Std 20 0200 251 CD...
Page 314: ...10 76 INTEGRA Operations Revision A 7 26 00 20 0200 231 CR 20 0200 232 Std 20 0200 251 CD...