ONTRAK Synergy Integra, Operation Manual

Page: 206 / 350

9-46 INTEGRA Operations Revision A 7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
DOSE MODE - 1ST WAFER or ALL WAFERS
37 Touch DOSE MODE for Brush Station #1 Cleaning to select
either 1
st
WAFER or ALL WAFERS.
After the Wafer Idle Time (next page) has elapsed, DOSE MODE
turns on to precondition the brushes prior to processing. Brush
dosing or conditioning is done by flowing process chemical and/or
Low Flow DI water to saturate the brushes to the required
processing pH. Brush dosing continues for the time set in the
WAFER DOSE TIME parameter (next page), then stops.
The current mode displays on the DOSE MODE button. 1
st
WAFER
mode will only dose the brushes with chemical before processing
the
first
wafer after the time set by the wafer Idle Timer has elapsed.
ALL WAFERS mode will dose the brushes with chemical before
processing for
every
wafer, not just the first.
38 Touch DOSE MODE for Brush Station #2 Cleaning to select
either 1
st
WAFER or ALL WAFERS.
Change WAFER IDLE TIME
39 The WAFER IDLE TIME is only active if the DOSE MODE is 1
st
WAFER. If the DOSE MODE is ALL WAFERS, then the set idle
time is ignored.
40 Touch WAFER IDLE TIME for Brush Station #1 Cleaning to
display the
NUMBER PAD
and set the idle time.
STANDARD