ONTRAK Synergy Integra, Operation Manual

Page: 135 / 350

C h a p t e r 6 S T A R T- U P A F T E R E M O & WA F E R R E C O V E R Y
7/26/00 INTEGRA Operations Revision A 6-17
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
Wafer Recovery from
Brush Station #2
Use this scenario to recover a wafer in Brush Station #2. In this
scenario, there is not a wafer in the Spin Station
or a wafer in Brush
Station #1.
To begin, display the
MAIN MENU
, then touch WAFER RECOVERY.
Respond to the following prompts as required.
Message Display Operator Response Action
Start Wafer Recovery? Touch
YES
Continue
Touch NO NO - taken out of wafer recovery
Are you sure? Touch YES Continue
Touch NO NO - taken out of wafer recovery
Put Machine into START. Press
START
button
on Operator Console
Cleaner automatically recovers wafer until it
reaches Brush Station #2 & then prompts operator.
Restarting Spin None None - automatic
Spin Restarted None None - automatic
Spin Recovery Complete None None - automatic
Is there a wafer in Brush #2? Touch YES Cleaner processes wafer in Brush Station #2.
Recovering Brush #2 Wafer None None - automatic
Brush #2 Wafer Complete None None - automatic
Is there a wafer in Brush #1? Touch
NO
Cleaner completes wafer recovery.
Brush #1 Wafer Complete None None - automatic
Waiting for Recovery to Finish None None - automatic
Recovery Complete! Touch OK Takes cleaner out of recovery mode.