ONTRAK Synergy Integra, Operation Manual

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7-4 INTEGRA Operations Revision A 7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
ACTIVATE/DEACTIVATE FLAT FINDER
Use the BRUSH #2 PROCESS RECIPE screen to activate/deactivate
the flat finder.
PASSWORD OR
KEY REQUIRED
If the Integra is processing wafers that do not have a flat (i.e., 8 inch -
200 mm), the flat finder speed must be set to “0.” If the flat finder
speed is not set to “0,” system processing “stalls” while the flat finder
looks for the non existent wafer flat.
If the system is processing wafers with flats (i.e., 6 inch - 150 mm), the
FLAT FINDER SPEED button must be set to the appropriate number.
If no number (“0”) is set in the FLAT FINDER SPEED, the flat will not
be found and the wafer will not be properly aligned for pickup by the
Spin Station’s spindle fingers.
1 From the
MAIN MENU
screen, touch ENGINEERING MENU.
2 From the
ENGINEERING OPTIONS
screen, touch DEFINE PROCESS.