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10-34
INTEGRA Operations Revision A
7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
Reason:
This alarm indicates that the sensor does not report the
Megasonic arm as being retracted.
Disposition:
Spin Station program will not continue until
megasonic
arm home retract
sensor reports the arm in the retract position.
GEM ALID: 57
GEM Alarm.
A
LARM
ID: 58
Description:
Time-out Looking For
Spindle Lock Retract
Sensor
Posting Program:
Spin Station
Alarm Type:
Alarm & Sonalert
Reason:
The spindle lock was told to disengage but the sensor
did not report correctly.
Disposition:
The Spin Station program will not continue until the
spindle lock retract
sensor reports that the locking mechanism is
retracted.
GEM ALID: 58
GEM Alarm.
A
LARM
ID: 59
Description:
Time-out Looking For
N
2
Arm Retract
Sensor
Posting Program:
Spin Station
Alarm Type:
Alarm & Sonalert
Reason:
When the N
2
arm is told to retract, the
N
2
arm retract
sensor is monitored. If after 10 seconds, the sensor does not
report the retract position, this alarm is posted.
Disposition:
The Spin Station program will not continue until the
N
2
arm retract
sensor reports the N
2
arm in the retract position.
GEM ALID: 59
GEM Alarm.
A
LARM
ID: 60
Description:
Time-out Looking For
N
2
Arm
Extend
Sensor
Posting Program:
Spin Station
Alarm Type:
Alarm & Sonalert
ALCD
ALTX
ON CEID OFF CEID
6
57 Time-out looking for Megasonic Arm Home
Retract Sensor
.
315
316
ALCD
ALTX
ON CEID OFF CEID
6
58 Time-out looking for Spindle Lock Retract
Sensor.
317
318
ALCD
ALTX
ON CEID OFF CEID
6
59 Time-out looking for N
2
Arm Retract Sensor.
319
320
Summary of Contents for Synergy Integra
Page 8: ......
Page 24: ...1 4 INTEGRA Operations Revision A 7 26 00 20 0200 231 CR 20 0200 232 Std 20 0200 251 CD...
Page 38: ...2 14 INTEGRA Operations Revision A 7 26 00 20 0200 231 CR 20 0200 232 Std 20 0200 251 CD...
Page 222: ...9 62 INTEGRA Operations Revision A 7 26 00 20 0200 231 CR 20 0200 232 Std 20 0200 251 CD...
Page 314: ...10 76 INTEGRA Operations Revision A 7 26 00 20 0200 231 CR 20 0200 232 Std 20 0200 251 CD...