3-22
INTEGRA Operations Revision A
7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
FLAT FINDER DELAY
Timer
. Touch to display the NUMBER PAD screen so that the Flat
Finder Delay time can be set. Enter the time, then touch ENTER.
LID OPERATIONS
Interactive Button.
Touch this button to display the BRUSH LID
OPERATIONS screen. This screen provides all controls for locking/
unlocking, and opening/closing the Brush Station lid.
HF PURGE
Interactive Button
. Activates the purge cycle for the entire Brush Station
when HF is being used in processing. If HF is being used in the system,
this button will be displayed. If the HF processing is not being used,
the button will not be displayed.
Icon Status:
The right side of the HF PURGE button displays
ACTIVE
when the system is purging DI water through the Brush Station
chamber rinse manifolds. While purging, the DI FLUSH SOLENOID
icon is also
green.
The box containing the number
300
, indicates the
number of seconds that the system will purge the brush box before
unlocking and opening the Brush Station lid.
NH
4
OH SOLENOID
(Optional in Brush
Station #2.
If NH
4
OH is
selected, HF cannot be
dispensed.
)
Solenoid.
OPENS or CLOSES the valve that controls the NH
4
OH
delivery to Brush Station #2 brushes. Both the NH
4
OH valve and the
NH
4
OH REDUNDANT valve (described below) must be OPEN for
NH
4
OH to flow to the upper brush core or drip manifold. Touch the
NH
4
OH SOLENOID button to activate the solenoid.
Icon Status:
Icon is
green
when the NH
4
OH valve is OPEN and
red
when the valve is CLOSED.
HF SOLENOID
(Normal process
chemical in Brush Station
#2.
If HF is selected,
NH
4
OH cannot be
dispensed.
)
Solenoid.
OPENS and CLOSES the valve that controls the HF injection into
the Brush Station #2 upper brush. Both the HF SOLENOID and the HF
REDUNDANT valves (described below) must be OPEN for HF to flow to
the upper brush. Touch HF SOLENOID to activate the solenoid.
Icon Status:
Icon is
green
when the HF valve is OPEN (running HF
through the Brush Station #2 upper brush) and
red
when the valve is
CLOSED.
REDUNDANT
SOLENOID
(Second Solenoid)
Solenoid
. OPENS and CLOSES a second valve that controls the HF (or
optional NH
4
OH) delivery to Brush Station #2 brushes. Both the HF
REDUNDANT SOLINOID and the HF SOLINOID (or NH
4
OH
SOLINOID) valve, described above, must be OPEN for HF to flow to
the upper brush core or drip manifold. Touch the REDUNDANT
SOLINOID to change the solenoid.
Icon Status:
Icon is
green
when the second HF (or NH
4
OH) valve is
OPEN (to allow HF, or NH
4
OH, to dispense to the upper brush) and
red
when the valve is CLOSED.
DI LOW FLOW
Solenoid
. OPENS and CLOSES the valve which delivers a low flow of
DI water through the brushes when not processing with HF.
The valve
is CLOSED when prediluted chemical is being dispensed in Brush
Station #2.
The DI HI FLOW and DI LOW FLOW valves work in
concert to provide the required DI water flow through the brushes.
Icon Status:
Icon is
red
when the valve is OPEN, with DI water flowing
through the Brush Station #2 brushes and
green
when it is CLOSED.
OUTPUT NAMES
DESCRIPTION
Summary of Contents for Synergy Integra
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