ONTRAK Synergy Integra, Operation Manual

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C h a p t e r 7 O P T I O N A L P R O C E S S S E T T I N G S
7/26/00 INTEGRA Operations Revision A 7-15
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
FIRST WAFER DOSE
Use the FIRST WAFER DOSE button to enable/disable the first wafer
effect processing used to clean the brushes before the first wafer in a
cassette or batch. The First Wafer Dose (Effect) can also be set in the
Process Recipe.
1 From the
MAIN MENU
screen, touch SELECT OPTIONS.
2 When the
SYSTEM OPTIONS
screen displays, touch the FIRST
WAFER DOSE button to toggle between Enabled and Disabled .
The current status displays on the right side of the button.
3 Touch EXIT to return to the
MAIN MENU
screen.