ONTRAK Synergy Integra, Operation Manual

Page: 322 / 350

10-84 INTEGRA Operations Revision A 7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
CLOSE INPUT STATION DOOR
The Close Input Station Door message (command) closes the
exterior Input Station door after the Input Robot arm exits the
Input Station. Once the door is closed, wafer processing starts.
The Input Station door is not the Input Station lid.
S2F41 [W]
<L [2]
<A
‘Close-Door’
>
* Remote Command String
<L
>
> .
OPEN SPIN STATION FINGERS
The Open Spin Station Fingers message (command) instructs the
Spin Station Fingers to open after the Output Robot Arm is
positioned under and pneumatically attached to the wafer.
S2F41 [W]
<L [2]
<A
‘Open-Fingers’
>
* Remote Command String
<L
>
> .