ONTRAK Synergy Integra, Operation Manual

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6-18 INTEGRA Operations Revision A 7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
Wafer Recovery from
Brush Station #1
Use this scenario to recover a wafer in Brush Station #1. In this
scenario, there is
not a wafer in Brush Station #2.
To begin, display the
MAIN MENU
, then touch WAFER RECOVERY.
Respond to the following prompts as required.
.
Message Display Operator Response Action
Start Wafer Recovery? Touch YES Continue
Touch NO NO - taken out of wafer recovery
Are you sure? Touch YES Continue
Touch NO NO - taken out of wafer recovery
Put Machine into START. Press START button
Operator Console
Cleaner automatically recovers wafer until it
reaches Brush Station #2 & prompts operator, “Is a
wafer in Brush #2?”
Restarting Spin None None - automatic
Spin Restarted None None - automatic
Spin Recovery Complete None None - automatic
Is there a wafer in Brush #2? Touch NO Cleaner completes wafer recovery.
Brush #2 Recovery Complete None None - automatic
Is there a wafer in Brush #1? Touch YES Cleaner processes wafer in Brush #1.
Brush #1 Recovery Complete None None - automatic
Waiting for Recovery to Finish None None - automatic
Recovery Complete! Touch OK Takes cleaner out of recovery mode.