6-16
INTEGRA Operations Revision A
7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
WAFER RECOVERY WITH POWER ON (NO EMO)
Three Wafer Recovery Scenarios - Power ON
The following three wafer recovery scenarios are different from the
preceding Wafer Recovery after EMO scenarios. These scenarios are
performed with system power ON and represent ”lost” wafer
conditions. Because the system status does not know the condition of
a wafer, the operator must manually respond to system wafer
recovery questions.
The three scenarios are: Wafer Recovery from Brush Station #1; Wafer
Recovery from Brush Station #2; Wafer Recovery from Brush Station
#1, Brush Station #2, and Spin Station. Each displayed message is
presented and the operator response and operator action are
identified. All wafer recovery begins by displaying the
MAIN MENU
screen
, then touching the WAFER RECOVERY button.
A
NOTE:
Before recovering wafers in either Brush Station #1 or #2, always visually
determine the status of the wafer. If a wafer has “tipped” down (no longer on the wafer
plane), then do the following
BEFORE
recovering the wafer: 1) place system in
STOP
,
2) locate the
bottom
brush motor, 3) turn motor
clockwise
until the wafer moves
backwards and levels (does not dips down), then 4) press
START
and recover wafer(s).
Summary of Contents for Synergy Integra
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