C h a p t e r 1 0 A L A R M S
7/26/00
INTEGRA Operations Revision A
10-41
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
A
LARM
ID: 75
Description:
Time-out In Unload, Wrist Not In Output Position
Posting Program:
Unload Handler
Alarm Type:
Alarm & Sonalert
Reason:
When it is time to move the rotation arm from the
“above spin” position to the “output” position, the wrist is
checked to make sure it is in the output position. If it is not, this
alarm is posted.
Disposition:
The Unload Handler program will not continue
until the wrist is detected in the output position.
GEM ALID: 75
GEM Alarm.
A
LARM
ID: 76
Description:
Failure In Unload, Lost Wafer In Lifter
Posting Program:
Unload Handler
Alarm Type:
Alarm & Sonalert
Reason:
After the rotation arm has moved from the Spin Station
to the Output Station, the lifter is told to make it’s final move up
to take the wafer. If the wafer is not found after this move, the
alarm is posted.
Disposition:
The system is put into STOP mode and the Unload
Handler program will continue when the system is put back into
RUN mode.
GEM ALID: 76
GEM Alarm.
A
LARM
ID: 77
Description:
Time-out In Unload, Wrist Not In Clear Position
Posting Program:
Unload Handler
Alarm Type:
Alarm & Sonalert
6
74 Failure in Unload Handler, can’t find wafer in
Lifter (blade).
349
350
ALCD
ALTX
ON CEID OFF CEID
6
75 Time-out In Unload Handler, wrist not in
Output position
.
351
352
ALCD
ALTX
ON CEID OFF CEID
6
76 Failure in Unload Handler, lost wafer in
Lifter.
353
354
Summary of Contents for Synergy Integra
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Page 24: ...1 4 INTEGRA Operations Revision A 7 26 00 20 0200 231 CR 20 0200 232 Std 20 0200 251 CD...
Page 38: ...2 14 INTEGRA Operations Revision A 7 26 00 20 0200 231 CR 20 0200 232 Std 20 0200 251 CD...
Page 222: ...9 62 INTEGRA Operations Revision A 7 26 00 20 0200 231 CR 20 0200 232 Std 20 0200 251 CD...
Page 314: ...10 76 INTEGRA Operations Revision A 7 26 00 20 0200 231 CR 20 0200 232 Std 20 0200 251 CD...
