ONTRAK Synergy Integra, Operation Manual

Page: 221 / 350

C h a p t e r 9 P R O C E S S R E C I P E
7/26/00 INTEGRA Operations Revision A 9-61
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
Integra Process Of Record (POR) Program - _________________________
Diameter: 200 mm Application: _______________________ Recipe: _____________
1st Brush Station Event 1 Event 2 Event 3 Other BB1 Params
Chem 1: (On/Off) _____ _____ _____ Exit Spray (On/Off) ___________
DI High Flow (On/Off) _____ _____ _____ Entrance Spray (On/Off) ___________
DI Low Flow (On/Off) _____ _____ _____ DI Low Flow Mode (On/Off) ___________
Time (sec) _____ _____ _____ Process Alarm Timeout (sec) ___________
Roller Speed (rpm) _____ _____ _____ DI Flush Duration (sec) ___________
Brush Speed (rpm) _____ _____ _____ Brush Idle Speed (rpm) ___________
Edge Clean (On/Off) _____ _____ _____ Brush Height (mm) ___________
2nd Brush Station Event 1 Event 2 Event 3 Other BB2 Params
Chem 2: (On/Off) _____ _____ _____ Exit Spray (On/Off) ___________
DI High Flow (On/Off) _____ _____ _____ DI Low Flow Mode (On/Off) ___________
DI Low Flow (On/Off) _____ _____ _____ Process Alarm Timeout (sec) ___________
Time (sec) _____ _____ _____ DI Flush Duration (sec) ___________
Roller Speed (rpm) _____ _____ _____ Brush Idle Speed (rpm) ___________
Brush Speed (rpm) _____ _____ _____ Brush Height (mm) ___________
Edge Clean (On/Off) _____ _____ _____ Flat Finder (rpm) ___________
BB1 Modify Brush Cleaning BB2 Modify Brush Cleaning
Idle Chem (On/Off) _________ Idle Chem (On/Off) ___________
Idle Low Flow DI (On/Off) _________ Idle Low Flow DI (On/Off) ___________
Idle Ligh Flow DI (On/Off) _________ Idle Ligh Flow DI (On/Off) ___________
Brush Idle Timer (sec) _________ Brush Idle Timer (sec) ___________
Brush Idle On Time
(sec) _________
Brush Idle On Time
(sec) ___________
Brush Idle Off Time
(sec) _________
Brush Idle Off Time
(sec) ___________
Edge Cln On Time
(sec) _________
Edge Cln On Time
(sec) ___________
Edge Cln Off Time
(sec) _________
Edge Cln Off Time
(sec) ___________
Dose Low Flow DI (On/Off) _________ Dose Low Flow DI (On/Off) ___________
Wafer Idle Time (sec) _________
Wafer Dose Time (sec) _________ Wafer Dose Time (sec) ___________
Dose Mode (1st Water) _________ Dose Mode (1st Water) ___________
Spin Station Program
DEVICE Event 1 Event 2 Event 3 Event 4 Event 5 Event 6
Upper Rinse (On/Off)
Lower Rinse (On/Off)
Heat Lamp (On/Off)
Meg Gen (On/Off)
Time (sec)
Spindle Speed (rpm)
Meg Sweeps (# of sweeps)
Seconds/Sweep (sec)
NOTE:
BB1:
BB2: