10-60
INTEGRA Operations Revision A
7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
Reason:
This alarm is only posted on
Series II (Series IIi)
systems that
use a CMP host with GEM interface.
The DSS-200 or Integra has
“timed out” waiting for the CMP host system to issue the GEM
Close Door remote command. The GEM Close Door remote
command instructs the DSS-200 or Integra to close the Input Door
(not Input Station lid). The timer for this alarm starts once the Take
Wafer remote command is received from the CMP host system.
Disposition:
When the GEM DSS-200 or Integra handshake
sequence terminates, the Input Door remains open and the Input
Station’s transfer belt returns to an idle state (disabled). The CMP
host system must re-send the GEM Open Door remote command
and
the Take Wafer remote command to restart the timer (whether
or not a wafer is present in the Input Station). The CMP host system
can then send a new GEM Closed Door remote command to
continue with the handshake sequence.
GEM ALID: 123
GEM Alarm.
A
LARM
ID: 124
Description:
Timeout Waiting For GEM Wafer Accepted Remote
Command (RCMD)
Posting Program:
Spin
Alarm Type:
Alarm & Sonalert
Reason:
This alarm is only posted on
Series II (Series IIi)
systems that
use a CMP host with GEM interface.
Alarm is not currently
implemented.
Disposition:
Alarm is not currently implemented.
GEM ALID: 124
GEM Alarm.
A
LARM
ID: 125
Description:
Input Station Door Blocked By Wafer Or Robot Arm
Posting Program:
Input
Alarm Type:
Alarm & Sonalert
Reason:
This alarm is only posted on
Series II (Series IIi)
systems that
use a CMP host with GEM interface.
The CMP host system sent the
GEM Closed Door remote command, but the DSS-200 or Integra
Input Station Entry sensor is blocked by either a wafer or the
Input (loading) Robot arm.
ALCD
ALTX
ON CEID OFF CEID
6
123 Timeout waiting for GEM “Close Door
Remote” command (RCMD).
445
446
ALCD
ALTX
ON CEID OFF CEID
6
124 Timeout waiting for GEM “Wafer Accepted
Remote” command (RCMD).
447
448
Summary of Contents for Synergy Integra
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