ONTRAK Synergy Integra, Operation Manual

Page: 212 / 350

9-52 INTEGRA Operations Revision A 7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
Use the following procedure with each of the nine separate EVENTS.
1 Touch MODIFY SPIN EVENTS
1-3
to access the variable settings for
the first three Spin Station EVENTS. This displays the
SPIN STATION
PROCESS PROGRAM DEFINE EVENTS 1-3
for EVENTS
1-3
.
Time 0-1800
(3 min max)
10
th
of seconds
Spindle Speed
(Never run above 2000 rpm with
wafer present.)
0, or 30-2500 rpm
Megasonic Sweeps 0-25 sweeps
Seconds/Sweep 0, or 5-15 seconds/sweep
STANDARD
TEST
TEST2
SHORT
Spin Station recipe
access buttons used
to set the 9 EVENTS
that control the total
Spin Station process
dry cycle.
STANDARD