ONTRAK Synergy Integra, Operation Manual, Page: 164 / 350

9-4 INTEGRA Operations Revision A 7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
To create a complete Process Recipe each of the six processes:
MODIFY BRUSH #1 RECIPE, MODIFY BRUSH #2 RECIPE,
MODIFYBRUSH CLEANING, MODIFY SPIN EVENTS 1-3,
MODIFY SPIN EVENTS 4-6, and MODIFY SPIN EVENTS 7-9
(circled buttons in previous illustration)
must be accessed and their
variables assigned. The method of assigning variables for each of the
sections (buttons) of the Process Recipe is presented below.
Use the following table when setting Brush Station #1 and Brush
Station #2 parameters.
* Standard motor maximum rpm is 140.
Optional motors are available with maximum speeds of 190 or 450 rpm.
Parameter Range Units
Brush #1 and #2 Stations
Entrance Spray (Brush #1 only) On/Off Binary (1 or 0)
Process Chemistry On/Off Binary (1 or 0)
Brush Height >0, <50
(5 mm max)
10
th
of mm
Event Time 0 - 1800 (3 min)
(0-180 seconds)
10
th
of seconds
Roller Speed 30 - 140*/190/450 rpm
Brush Speed 30 - 140*/190/450 rpm
Drip Time 0 - 1800 (3 min)
(0-180 seconds)
10
th
of seconds
Drip Wafer Count 0 - 500 each
Brush Idle Timer
(Brush Clean Start)
0 - 864000 (24 hrs)
10
th
of seconds
Idle Clean ON Time 0 - 36000 (1 hour)
10
th
of seconds
Idle Clean OFF Time 0 - 864000 (24 hrs)
10
th
of seconds
Edge Clean, Clean ON time 0 - 36000 (1 hour)
10
th
of seconds
Edge Clean, Clean OFF time 0 - 36000 (1 hour)
10
th
of seconds
Brush Idle Speed 0 - 140*/190/450 rpm
Wafer Idle Time 0 - 864000 (24 hrs)
10
th
of seconds
Wafer Dose Time 0 - 36000 (1 hour)
10
th
of seconds
Flat Finder Speed (Brush #2 only)
(standard motor)
10 - 140*/190/450 rpm
Exit Spray (Brush #1 only) On/Off Binary (1 or 0)
Inside Brush Exit Spray (Brush #2) On/Off Binary (1 or 0)