ONTRAK Synergy Integra, Operation Manual

Page: 259 / 350

C h a p t e r 1 0 A L A R M S
7/26/00 INTEGRA Operations Revision A 10-21
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
Posting Program: Brush 2 Station
Alarm Type: Alarm & Sonalert
Reason: This alarm indicates that a wafer has left Brush Station
#1 but after 10 seconds the leading edge of the wafer has still not
been detected.
Disposition: The Brush 2 Station program will not continue until
the leading edge of the wafer is detected.
GEM ALID: 22
GEM Alarm.
A
LARM
ID: 23
Description: Brush Station #2 Waiting On Wafer From Brush
Station #1
Posting Program: Brush 2 Station
Alarm Type: Alarm & Sonalert
Reason: This alarm indicates that a wafer has left the Brush Station
#1 and the leading edge of the wafer was detected, but after 10
seconds the trailing edge of the wafer has still not been detected. The
system thinks that the wafer is not completely in Brush Station #2.
Disposition: The Brush 2 Station program will not continue until
the trailing edge of the wafer is detected.
GEM ALID: 23
GEM Alarm.
A
LARM
ID: 24
Description: Brush Station #2 Can’t Move Wafer Off Flat
Posting Program: Brush 2 Station
Alarm Type:
Alarm & Sonalert
Reason: If the Flat Finder is enabled and it is time to locate the
flat, a test is first made to see if the sensor detects the flat. If the
flat is detected, the wafer needs to be rotated off the flat so that
the exact location of the flat can be determined. This alarm is
posted if the wafer cannot be rotated off the flat and indicates the
wafer is not rotating.
Disposition: The Brush 2 Station program will not continue until
wafer rotation is detected by the sensor not detecting a flat.
GEM ALID: 24
GEM Alarm.
ALCD ALTX ON CEID OFF CEID
6 22 Brush #2 waiting on wafer from Brush 1. 245 246
ALCD ALTX ON CEID OFF CEID
6 23 Brush #2 waiting on wafer from Brush 1. 247 248
ALCD ALTX ON CEID OFF CEID