ONTRAK Synergy Integra, Operation Manual

Page: 233 / 350

C h a p t e r 9 P R O C E S S R E C I P E
7/26/00 INTEGRA Operations Revision A 9-73
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
4 The SELECT NEW DEFAULT button changes color to indicate it
is selected and the text changes to CANCEL NEW DEFAULT.
Also, the message at the top of the screen changes to “Select
Recipe for Default.”
5 Touch the “default recipe” in the list of recipes to select it. When
selected, the recipe is marked with an * . In the figure above the
default recipe is * STANDARD. Touch MAKE SELECTED
RECIPE DEFAULT to complete the selection. The message (see
following figure) at the top of the screen changes to “RECIPE:
“STANDARD” is DEFAULT, Please select an option.”
The system copies the “default” recipe. Each time a lot or cassette
of wafers starts, the currently selected recipe is compared to the
copied “default recipe”. If the recipes are the same, then the
cassette is automatically processed. If the recipes are different, a
message displays on the console screen.
Operator Message - In order to process a cassette with a “non
default recipe,” the operator must touch OK to acknowledge that
a “non default recipe” is being used.
*
STANDARD
TEST
TEST2
SHORT
Select Recipe for Default.
Make Selected
Recipe Default
CANCEL
NEW
DEFAULT