ONTRAK Synergy Integra, Operation Manual

Page: 180 / 350

9-20 INTEGRA Operations Revision A 7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
The BRUSH IDLE SPEED ( RPM ) sets the brush speed when the
cleaner is idle (not processing wafers) but is still ON (START button
pressed). Brushes must be kept wet and clean to be effective. DI
water must remain ON during idle periods and the brushes must
continue to rotate to maintain uniform wetness. If the brushes are
not rotating, the tops of the brushes will dry out within an hour.
When the system is in STOP mode, the brushes do not rotate. If the
system is to be down for more than an hour, see “Several Hours” on
page 5-14.
Change BRUSH HEIGHT
20 Touch BRUSH HEIGHT to display the
NUMBER PAD
to set the
distance between the top and bottom brushes.
21 Enter the desired BRUSH HEIGHT distance (
10
th
of
mm ) on the
NUMBER PAD
(not shown), and touch ENTER.
The BRUSH HEIGHT setting adjusts the distance between the
top and bottom brush (cleaning height distance) in Brush Station
#1, by adjusting only the top brush height.
B
CAUTION:
Brush height is critical and should only be changed by the process
engineer.
22 When all Brush Station #1 parameters are set, touch EXIT to
redisplay the
MODIFY STATION RECIPE
screen.
STANDARD