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Keysight E5260/E5270 Programming Guide, Edition 4

1- 33

Programming Basics

Data Output Format

Measurement or source output data type. One bit.

Data type. One bit.

Measurement or output range. Five bits.

Explanation

Source output data.

Measurement data.

Explanation

Voltage data.

Current data.

Explanation

01000 (8)

0.5 V or 1 pA range.

01001 (9)

5 V or 10 pA range.

01010 (10)

100 pA range.

01011 (11)

2 V or 1 nA range.

01100 (12)

20 V or 10 nA range.

01101 (13)

40 V or 100 nA range.

01110 (14)

100 V or 1

A range.

01111 (15)

200 V or 10

A range.

10000 (16)

100

A range.

10001 (17)

1 mA range.

10010 (18)

10 mA range.

10011 (19)

100 mA range.

10100 (20)

1 A range for E5280B/E5290A HPSMU

or 200 mA range for E5291A MPSMU.

11111 (31)

Invalid data is returned.

Summary of Contents for E5260 Series

Page 1: ...Keysight Technologies E5260 E5270 Series of Parametric Measurement Solutions Programming Guide...

Page 2: ...th these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or c...

Page 3: ...User s Guide B2900 9001x xxxx 201x Edition x...

Page 4: ...unctions This chapter explains the functions of the Keysight E5260 E5270 in the remote mode 3 Programming Examples This chapter lists the GPIB commands and explains the programming examples for each m...

Page 5: ...o Force Voltage Current 1 8 To Set the Integration Time 1 10 To Set the Measurement Range 1 11 To Pause Command Execution 1 12 To Start Measurement 1 12 To Force 0 V 1 12 To Disable Source Measurement...

Page 6: ...To Optimize the Source Measurement Wait Time 1 44 To Use the Internal Program Memory 1 45 To Get Time Data with the Best Resolution 1 45 To Use Sweep Source as a Constant Source 1 45 To Start Measurem...

Page 7: ...igital I O Port 2 27 Accessories 2 28 Digital I O Internal Circuit 2 29 Trigger Function 2 30 Trigger Input 2 31 Trigger Output 2 33 Using Trigger Function 2 35 Trig In Out Internal Circuit 2 41 Initi...

Page 8: ...Sweep Measurements 3 46 Using Program Memory 3 50 Tips to use program memory 3 51 Using Trigger Function 3 56 Reading Time Stamp Data 3 68 Reading Binary Output Data 3 69 Using Programs for 4142B 3 7...

Page 9: ...4 30 BSI 4 32 BSM 4 33 BSSI 4 36 BSSV 4 37 BST 4 38 BSV 4 39 BSVM 4 40 CA 4 41 CAL 4 42 CL 4 43 CM 4 44 CMM 4 45 CN 4 46 DFM 4 47 DI 4 48 DIAG 4 49 DO 4 50 DV 4 51 DZ 4 52 EMG 4 53 END 4 53 ERC 4 54...

Page 10: ...4 65 LOP 4 66 LRN 4 67 LSI 4 73 LSM 4 74 LSSI 4 75 LSSV 4 76 LST 4 77 LSTM 4 79 LSV 4 80 LSVM 4 81 MCH 4 81 MM 4 82 MPA 4 83 NUB 4 85 OPC 4 85 OS 4 86 OSX 4 86 PA 4 87 PAX 4 88 PI 4 89 PT 4 90 PV 4 9...

Page 11: ...P 4 102 SAR 4 103 SCH 4 104 SCR 4 104 SPA 4 105 SRE 4 106 SRE 4 107 SSR 4 108 ST 4 109 STB 4 110 TDI 4 111 TDV 4 112 TGMO 4 113 TGP 4 114 TGPC 4 116 TGSI 4 117 TGSO 4 118 TGXO 4 118 TI 4 119 TM 4 120...

Page 12: ...ontents VAR 4 129 WAT 4 130 WI 4 132 WM 4 134 WNU 4 135 WNX 4 136 WS 4 139 WSI 4 140 WSV 4 142 WSX 4 144 WT 4 145 WV 4 147 WZ 4 149 XE 4 150 5 Error Messages Channel Status Code 5 3 Error Codes 5 4 Op...

Page 13: ...1 Programming Basics...

Page 14: ...gramming Basics This chapter describes basic information to control the Keysight E5260 E5270 and contains the following sections Before Starting Getting Started Command Input Format Data Output Format...

Page 15: ...key d Press the arrow key to set the GPIB address of the E5260 E5270 then press the Enter key e Press the Exit key twice to close the setup menu NOTE Command execution examples In this section command...

Page 16: ...form Self Test To Perform Self Calibration To Perform Diagnostics To Enable Source Measurement Channels To Select the Measurement Mode To Force Voltage Current To Set the Integration Time To Set the M...

Page 17: ...ommand Example OUTPUT E5270 NUB ENTER E5270 A This example returns the number of data stored in the data output buffer To Perform Self Test The E5260 E5270 starts the self test by the TST command The...

Page 18: ...l I O port For diagnostics 1 and 4 the second parameter is available Available parameter values are 0 E5260 E5270 starts diagnostics immediately 1 E5260 E5270 starts diagnostics when the Enter key is...

Page 19: ...the staircase sweep measurement and assigns channel 1 the module installed in slot 1 of the E5260 E5270 as the measurement channel NOTE The Mode No is not assigned for the high speed spot measurement...

Page 20: ...weep voltage source WI Sets the staircase sweep current source WSI Sets the synchronous sweep current source PV PT Sets the pulsed voltage source PI PT Sets the pulsed current source PWV PT Sets the p...

Page 21: ...forces 5 V using channel 1 the module installed in slot 1 of the E5260 E5270 with auto ranging Measurement Mode Command Spot Measurement DV DI TDV TDI Staircase Sweep Measurement DV DI TDV TDI and WV...

Page 22: ...number of samples Example The following example sets the number of samples to 10 for the A D converter high speed ADC for the Keysight E5270B OUTPUT E5270 AV 10 1 The following example is for the Keys...

Page 23: ...ted auto ranging mode or the 1 pA fixed range mode Or enable the 1 pA range for the auto ranging mode by using the SAR command See SAR on page 4 103 NOTE Range change at state change Measurement range...

Page 24: ...command For the high speed spot measurement refer to To Perform High Speed Spot Measurement on page 1 18 To Force 0 V To force 0 V immediately send the DZ command The E5260 E5270 memorizes the present...

Page 25: ...wing commands When the instrument is turned on the SMU input will be connected to the ASU output However the SMU output switch will be off at this time Table 1 2 ASU Input Output Connection Control wh...

Page 26: ...To Read Spot Measurement Data After the spot measurements the E5260 E5270 puts the measurement data into its output data buffer You can read the data as shown below The examples read the header infor...

Page 27: ...Keysight E5260 E5270 Programming Guide Edition 4 1 15 Programming Basics Getting Started ret_val E5270 ReadString 3 12 1 head Left ret_val 3 mdata Val Mid ret_val 4 12...

Page 28: ...tor comma E5270 WriteString XE vbLf E5270 WriteString OPC vbLf rep E5270 ReadString 1 2 Response CRLF ret_val E5270 ReadString 16 nop For i 0 To nop 1 nop number of sweep steps head Mid ret_val 16 i 1...

Page 29: ...Data2 Source_data then TimeN N integer is the time when the DataN measurement is started Without the TSC command you can get the time data by the following commands TSR Resets the timer count Time 0 s...

Page 30: ...OUTPUT E5270 FMT 5 40 OUTPUT E5270 CN 1 2 3 4 50 OUTPUT E5270 DV 1 0 0 60 OUTPUT E5270 DV 2 0 0 70 OUTPUT E5270 DV 3 0 2 80 OUTPUT E5270 DV 4 0 5 90 OUTPUT E5270 TI 4 0 100 ENTER E5270 USING 3A 12D X...

Page 31: ...NOTE Terminator Terminator is necessary to enter the command to the Keysight E5260 E5270 For the available terminators see Terminator and Special Terminator on page 1 21 Header The header is the comma...

Page 32: ...owing figure shows the syntax diagram for numeric data Numeric Data Syntax Diagram The following 3 figures show the syntax diagrams for integer fixed point and floating point data respectively Integer...

Page 33: ...then executed together Special Terminator Syntax Diagram Separator If you enter multiple commands use semicolons to separate the commands Spaces are allowed before and after the semicolons Command exe...

Page 34: ...sfer time than ASCII format To select the data output format use the FMT command See FMT on page 4 59 For the query response the returned data is always stored in the query buffer in ASCII format rega...

Page 35: ...is cleared until the measurement is started Spot Data1 Data2 terminator DataN N integer is the value measured by a channel The order of Data is defined by the MM command Pulsed Spot Quasi Pulsed Spot...

Page 36: ...e value measured by the search monitor channel It is sent if data output is enabled by the BSVM command for the binary search or the LSVM command for the linear search TDI TDV command Time terminator...

Page 37: ...a elements depends on the FMT command setting Details of the elements are described on the following pages A Status One character B Channel number One character C Data type One character D Data Twelve...

Page 38: ...quasi pulsed spot measurement N T C V X G or S For other measurement N G S T C V X F B Channel number of the measurement source channel One character C Data type One character A Explanation W Data is...

Page 39: ...us conditions are found the sum of the EEE values is returned For example if an A D converter overflow occurred and an SMU was oscillating during the measurements the returned EEE value is 3 1 2 Statu...

Page 40: ...annel 1 B Channel 2 C Channel 3 D Channel 4 E Channel 5 F Channel 6 G Channel 7 H Channel 8 V GNDU Z Status code for extraneous data in the channel TSQ command response or invalid data is returned G E...

Page 41: ...e lower G For linear or binary search measurement the target value was not found within the search range Returns the source output value For quasi pulsed spot measurement the detection time was over t...

Page 42: ...0 Note that the resolution of the measurement data is larger than the resolution of the high resolution A D converter Data Format The data output format depends on the measurement mode as shown below...

Page 43: ...Pulsed Bias Block1 Block2 terminator Block1 is the block of data measured at the first sweep step Block2 is the block of data measured at the second sweep step where Block consists of the following da...

Page 44: ...ense are the 4 byte data as shown below There are 6 data elements Details of the elements are described in the following pages A Measurement or source output data type One bit B Data type One bit C Me...

Page 45: ...ation 0 Voltage data 1 Current data C Explanation 01000 8 0 5 V or 1 pA range 01001 9 5 V or 10 pA range 01010 10 100 pA range 01011 11 2 V or 1 nA range 01100 12 20 V or 10 nA range 01101 13 40 V or...

Page 46: ...top bit of the binary data is 0 Count is positive and equal to the decimal value of the 16 bit binary data that follows the top bit If the top bit is 1 Count is negative Calculate Count by subtractin...

Page 47: ...ollows For the quasi pulsed spot measurement 0 1 2 3 4 6 or 7 For other measurement 0 6 7 1 2 3 4 5 F Channel number of the measurement source channel Five bits E Explanation 001 Data is for the first...

Page 48: ...y search measurement the target value was not found within the search range Returns the source output value For quasi pulsed spot measurement the detection time was over the limit 3 s for Short mode 1...

Page 49: ...LOCAL LOCKOUT LL0 REMOTE SPOLL Serial Poll TRIGGER GET same as XE command Interface Function Code Description Source Handshake SH1 Complete capability Acceptor Handshake AH1 Complete capability Talker...

Page 50: ...even in the local state This allows you to confirm the E5260 E5270 GPIB command operation on the front panel LCD although it makes the operation time longer Execute the following statement to get this...

Page 51: ...when the E5260 E5270 receives a RST BC FMT or device clear command 1 2 Wait Indicates whether the instrument is in the wait status This bit is set to 1 when the E5260 E5270 has been set to the wait st...

Page 52: ...the E5260 E5270 does not send an SRQ to the controller Therefore if you remove a mask from a bit it is usually best to do it at the beginning of the program 5 32 Error Indicates whether any error has...

Page 53: ...on To Confirm the Command Completion To Disable the Auto Calibration To Optimize the Measurement Range To Optimize the Integration Time To Disable the ADC Zero Function To Optimize the Source Measurem...

Page 54: ...nt serves to delay its operation until the E5260 E5270 has completed its operation The OPC command is useful to control equipments sequentially For example the following program segment waits until th...

Page 55: ...mber of averaging samples of the A D converter This command is compatible with the AV command of the Keysight 4142B AAD Selects the type of the A D converter high speed ADC or high resolution ADC of t...

Page 56: ...ource wait time is not the same as the initial measurement wait time A and B are the command parameters of the WAT command The wait time settings are effective for all modules Figure 1 1 Source Measur...

Page 57: ...the timer To Use Sweep Source as a Constant Source The following setup enables sweep source to force a constant current or voltage Sweep start value Sweep stop value for WI WV or WNX Also setting numb...

Page 58: ...the received order However only the following commands can interrupt the command execution Table 1 5 Interrupt Commands Voltage or current Measurement trigger e g XE Hold Start value Stop value Previo...

Page 59: ...the linear search or binary search measurement as a substitute for the analog search measurement that needs the analog feedback unit AFU Use a source monitor unit SMU instead of the voltage source vo...

Page 60: ...nd correct the command syntax Even if the command name is the same the available parameters and values may be different Check and correct the command parameters To change the FMT command parameter Use...

Page 61: ...aircase pulsed sweep source setup ESC Sampling source setup MCC MI MP MSC MV Quasi static CV measurement setup QSL QSM QSR QST QSV QSZ QSZ PGU control POR SPG SPP SRP Stress source setup STC STI STM S...

Page 62: ...reuse the programs created for the Keysight E5270 series confirm the following and modify the programs if necessary To remove all unsupported commands The following commands are not supported by the K...

Page 63: ...2 Remote Mode Functions...

Page 64: ...nitial Settings NOTE Synchronous Output You can use synchronous output that will be synchronized to the output of the primary sweep or search source The output is available for the following measureme...

Page 65: ...Binary Search Measurements Linear Search Measurements NOTE About Search Measurements The E5260 E5270 supports search measurement to find a point on an I V curve where a specified condition is satisfi...

Page 66: ...channels measurement starts after the settling time You can use up to eight channels for the 8 ch mainframe two channels for the 2 ch mainframe If you use multiple measurement channels the channels pe...

Page 67: ...an be used for measurement 4 After measurement the pulse source channel forces the pulse base value If the next trigger occurs within the pulse period and if the rest of the pulse period is longer tha...

Page 68: ...surement channel starts measurement You can use up to eight channels for the 8 ch mainframe two channels for the 2 ch mainframe If you use multiple measurement channels the channels perform measuremen...

Page 69: ...start or stop value as specified by the WM command and keeps it Figure 2 4 Synchronous Sweep NOTE The WSV command sets the sweep voltage and the WSI command sets the sweep current You can use the sam...

Page 70: ...command However if a sweep source sets power compliance or forces logarithmic sweep current the sweep sources start output in the order specified by the n value Then the first output is forced by the...

Page 71: ...nd change the output to 0 V NOTE The WT command sets the hold time delay time and step delay time The WM command sets the automatic abort function and the output after measurement The WV WI command se...

Page 72: ...shown in Figure 2 6 The channel performs measurement so that the pulse width and pulse period are kept the integration time setting is ignored Only one channel can be used for measurement 4 After mea...

Page 73: ...p source forces the start value and keeps it Figure 2 7 Synchronous Sweep NOTE The WSV command sets the sweep voltage and the WSI command sets the sweep current You can use the same output mode voltag...

Page 74: ...nnel can be used for the pulsed source 3 The source channels start output by a trigger such as the XE command 4 After the hold time the measurement channel starts measurement as shown in Figure 2 8 Th...

Page 75: ...rent The start and stop values must have the same polarity for log sweep The PT command sets the pulse timing parameters such as pulse width and pulse period The PV command sets the voltage pulse and...

Page 76: ...current as the primary sweep The start and stop values must have the same polarity for log sweep To Stop Sweep Output An automatic abort function is available Refer to Automatic abort Function on pag...

Page 77: ...erforms voltage measurement settling detection in the interval set by the BDM command The voltage transition and settling detection continue until the output voltage slew rate becomes half of the rate...

Page 78: ...rce immediately returns the output to the start value and keeps it For 0 V output enter the DZ command that is used to memorize the present settings of the channel and change the output to 0 V NOTE If...

Page 79: ...for the search source 2 The search source starts output by a trigger such as the XE command 3 After the hold time the measurement channel waits for the delay time and starts measurement as shown in F...

Page 80: ...the output after search The BST command sets the hold time and delay time The BSV BSI command sets the search output and the BGI BGV command sets the measurement channel To Use Synchronous Output Cha...

Page 81: ...ement channel waits for the delay time and starts measurement as shown in Figure 2 13 The measurement channel can be set by the LGI or LGV command Only one channel can be used for the measurement 4 Af...

Page 82: ...ized with the search source Refer to Synchronous Output on page 2 21 After measurement the synchronous channel forces the start offset stop offset or the last output value as specified by the LSM comm...

Page 83: ...ommand Reference For the WSI and WSV commands start Synchronous sweep start value stop Synchronous sweep stop value The start and stop values must have the same polarity for logarithmic sweep For the...

Page 84: ...Example for Binary Search Voltage or current Start value Time Stop value Primary sweep Synchronous sweep Previous value Trigger e g XE WT WM WV WI WSV WSI Voltage or current Start value Stop value Pre...

Page 85: ...Measurements Multi Channel Sweep Measurements Pulsed Sweep Measurements Linear Search Measurements and Binary Search Measurements When abort occurs After measurement is aborted the source forces the...

Page 86: ...ete programs in the program memory as shown below For details on each command refer to Chapter 4 Command Reference To store programs Send the ST and END commands to store a program The following proce...

Page 87: ...variable is referred by multiple programs or commands set or change the value carefully so that the program works fine without errors Format of the variable is tn t integer I or real R n integer 1 to...

Page 88: ...y Table 2 1 Invalid Commands for Program Memory Category GPIB Command Reset RST Diagnostics DIAG Self test TST Self Calibration CA CAL CM Abort AB Channel Control RCV WZ Program Memory ST END SCR VAR...

Page 89: ...nector type of the digital I O port is D Sub 25 pin The pin assignment is shown in Table 2 2 In the initial setting the all port forces TTL high level approx 2 4 V TTL low is approx 0 8 V The above co...

Page 90: ...in connector and a D Sub m 25 pin connector This cable must be used to connect three or more E5260 E5270s Cable length is as following D Sub m to D Sub m Approx 1 5 m Both connectors should be connect...

Page 91: ...ital I O Internal Circuit The following figure shows the input output circuits internally connected to each port pin of the Digital I O connector Figure 2 18 Digital I O Internal Circuit Vcc R2 R1 Q1...

Page 92: ...send trigger Digital I O D Sub 25 pin connector Sixteen paths are available for the trigger port Each path can be used for either input or output For the pin assignment and accessories refer to Digit...

Page 93: ...ut Trigger The E5260 E5270 responds to the input trigger minimum pulse width 10 s that changes the signal level from high approx 2 4 V to low approx 0 8 V This is negative logic You can change it to p...

Page 94: ...put Trigger Commanda a t selects trigger input terminal Ext Trig In or a digital I O path p selects positive or negative logic of the trigger m selects Case 1 or Case 2 of the trigger type 2 see Figur...

Page 95: ...ompleted see Figure 2 22 Initially the negative edge trigger is sent Source Trigger Delay Delay time from when the source output setup is completed until an edge trigger is sent or a gate trigger leve...

Page 96: ...t selects the trigger output terminal Ext Trig Out or a digital I O p selects positive or negative logic m selects edge or gate trigger 1 When the measurement specified by the MM command is completed...

Page 97: ...A PAX command The wait time parameter is available for the PA PAX command If you specify the wait time the wait state continues until the time has elapses or until the event occurs Available value 99...

Page 98: ...P BASIC CLEAR statement if any other commands have already been entered NOTE For easy programming do not enter the TM command or use the TM1 TM2 or TM4 event mode The TM3 event mode will complicate pr...

Page 99: ...t measurement mode Sets measurement condition OUTPUT E5270 TM3 Uses external trigger ENTER E5270 USING 3X 12D 2X M_data 3 Execute the control program The E5260 E5270 sets the measurement conditions an...

Page 100: ...urement condition OUTPUT E5270 TM3 Uses external trigger OUTPUT E5270 TGP 1 1 1 1 Sets trigger input OUTPUT E5270 TGP 2 2 1 1 Sets trigger output OUTPUT E5270 TGXO 2 Enables gate trigger ENTER E5270 U...

Page 101: ...ent trigger OUTPUT E5270 TGP 2 1 2 3 Start Step Measurement trigger OUTPUT E5270 TGP 1 1 2 2 Start Step Output Setup trigger OUTPUT E5270 TGP 2 2 2 1 Measurement Completion trigger OUTPUT E5270 TGP 12...

Page 102: ...a step measurement and sends the Step Measurement Completion trigger If the trigger is received during the delay time the E5260 E5270 performs this after the delay time By the next Start Step Output...

Page 103: ...nput output circuits internally connected to the Trig In Out connectors Figure 2 24 Trigger Input Internal Circuit Figure 2 25 Trigger Output Internal Circuit Vcc R1 R2 to trigger input control from T...

Page 104: ...umber MCH Measurement data to be displayed Data 1 Compliance side data MPA Data 2 none MPA Output channel Channel assigned the lowest number SCH Output data to be displayed Data 1 OUT SPA Data 2 CPL S...

Page 105: ...WM Pulse source parameters cleared PV PI Pulse sweep source parameters cleared PWV PWI Pulse width 0 001 s PT Pulse period 0 01 s PT Search source parameters cleared BSV BSSV BSI BSSI LSV LSSV LSI LS...

Page 106: ...TGP Trigger condition of Start Step Output Setup trigger with trigger for first sweep step TGSI Type of output trigger Edge trigger TGXO TGSO TGMO Digital I O port Output for all port ERM Program memo...

Page 107: ...tic abort function off WM output after sweep measurement Start value WM Pulse source parameters cleared PV PI Pulse sweep source parameters cleared PWV PWI Pulse width 0 001 s PT Pulse period 0 01 s P...

Page 108: ...2 46 Keysight E5260 E5270 Programming Guide Edition 4 Remote Mode Functions Initial Settings...

Page 109: ...3 Programming Examples...

Page 110: ...pot Measurements Spot Measurements Pulsed Spot Measurements Staircase Sweep Measurements Pulsed Sweep Measurements Staircase Sweep with Pulsed Bias Measurements Quasi Pulsed Spot Measurements Linear S...

Page 111: ...in Table 3 1 To run the program insert the example subprogram or your subprogram instead of the perform_meas subprogram in the template NOTE To Start Program If you create the measurement program by...

Page 112: ...Basic NET on your computer The VISA COM Library is included in the IO Library To Create Your Project Template Before starting programming create your project template and keep it as your reference It...

Page 113: ...wafer and so on Parameters characteristics to be measured hFE Vth sheet resistance and so on Measurement method Spot measurement staircase sweep measurement and so on Step 2 Make a copy of your proje...

Page 114: ...red to use the VISA COM library 5 to 23 Main subprogram establishes the software connection with the Keysight E5260 E5270 resets the E5260 E5270 opens a message box to confirm the start of measurement...

Page 115: ...gram 26 to 32 Declares variables used in this program template The values are dummy You must change the values to match your program If you find unnecessary variables delete them i and j Variables use...

Page 116: ...ger 60 For j 0 To nop2 1 For i 0 To nop1 1 value value data j i Next i Next j value value Chr 10 Chr 10 Data save completed value value Chr 10 Chr 10 Do you want to perform measurement again rbx MsgBo...

Page 117: ...s CN chnum chnum Disables channels CL chnum chnum Sets filter ON OFF FL mode chnum chnum Sets series resistor ON OFF SSR chnum mode Sets integration time Keysight E5270B can use AAD AIT instead of AV...

Page 118: ...As Double 3 13 Dim vg As Double 1 Dim idcomp As Double 0 05 Dim igcomp As Double 0 01 Dim orng As Integer 0 Dim mrng As Integer 0 session WriteString FMT 1 vbLf 20 session WriteString AV 10 1 vbLf se...

Page 119: ...ta j i Chr 13 Chr 10 meas 1000000 status mtime 1000 session WriteString DZ vbLf 43 save_data fname title value data nop1 nop2 session t Exit Sub Check_err 47 session WriteString EMG err vbLf msg sessi...

Page 120: ...chnum Sets filter ON OFF FL mode chnum chnum Sets series resistor ON OFF SSR chnum mode Sets integration time Keysight E5270B can use AAD AIT instead of AV AV number mode AAD chnum type AIT type mode...

Page 121: ...amp output session WriteString FL 0 vbLf sets filter off session WriteString AV 10 1 vbLf sets number of samples for 1 data session WriteString DV t 3 0 0 0 1 vbLf out 0 V comp 0 1 A session WriteStri...

Page 122: ...i Chr 13 Chr 10 meas 1000000 status mtime 1000 session WriteString DZ vbLf 46 save_data fname title value data nop1 nop2 session t Exit Sub Check_err 50 session WriteString EMG err vbLf msg session R...

Page 123: ...are ignored Function Command Parameters Enables channels CN chnum chnum Disables channels CL chnum chnum Sets filter ON OFF FL mode chnum chnum Sets series resistor ON OFF SSR chnum mode Forces consta...

Page 124: ...1 1 vbLf sets number of samples for 1 data session WriteString DV t 3 0 0 0 1 vbLf out 0 V comp 0 1 A session WriteString DV t 2 0 0 0 1 vbLf out 0 V comp 0 1 A Dim g_pt As String 0 1 0 01 0 02 hold...

Page 125: ...Chr 13 Chr 10 meas 1000000 status mtime 1000 session WriteString DZ vbLf 48 save_data fname title value data nop1 nop2 session t Exit Sub Check_err 52 session WriteString EMG err vbLf msg session Rea...

Page 126: ...AD AIT instead of AV AV number mode AAD chnum type AIT type mode N Sets sweep source timing parameter WT hold delay sdelay tdelay mdelay Sets auto abort function WM abort post Sets voltage sweep sourc...

Page 127: ...ep output value Dim d_vg As Double 0 secondary sweep step value delta If nop2 1 Then d_vg vg2 vg1 nop2 1 Dim hold As Double 0 Dim delay As Double 0 Dim s_delay As Double 0 Dim p_comp As Double 0 3 Dim...

Page 128: ...r i 0 To nop1 1 tm i Val Mid mret 4 16 3 i 12 st i Mid mret 17 16 3 i 3 md i Val Mid mret 20 16 3 i 12 sc i Val Mid mret 36 16 3 i 12 data j i Chr 13 Chr 10 vg sc i md i 1000 tm i st i 63 Next i vg vg...

Page 129: ...2 1 5 4455 0 15219 NEI 2 2 4 5 474 0 16794 NEI 2 2 7 5 4935 0 18367 NEI 2 3 5 513 0 19941 NEI 3 0 0 0027225 0 03542 NEI 3 0 3 3 4465 0 05861 NEI 3 0 6 6 4185 0 07436 NEI 3 0 9 8 904 0 09011 NEI 3 1 2...

Page 130: ...elta If nop2 1 Then d_vg vg2 vg1 nop2 1 Dim hold As Double 0 Dim delay As Double 0 Dim s_delay As Double 0 Dim p_comp As Double 0 3 session WriteString FMT 5 1 vbLf ASCII comma w sweep source data 27...

Page 131: ...type V Then sdata rdata source data Next k 63 If mstat N Then session WriteString DZ vbLf GoTo Check_err disp_data Vg vg V disp_data disp_data Vd sdata V disp_data disp_data Id mdata 1000 mA disp_data...

Page 132: ...02838 0 04035 N 3 0 3 3 445 0 06253 N 3 0 6 6 416 0 07754 N 3 0 9 8 8995 0 09331 N 3 1 2 10 895 0 10238 N 3 1 5 12 425 0 10732 N 3 1 8 13 51 0 11182 N 3 2 1 14 215 0 11484 N 3 2 4 14 63 0 11813 N 3 2...

Page 133: ...As Double vd1 Dim vg2 As Double vd2 Dim igcomp As Double 0 01 Dim pg_comp As Double 0 05 Dim hold As Double 0 Dim delay As Double 0 Dim s_delay As Double 0 Dim rep As Integer nop1 Dim mret As String...

Page 134: ...op1 1 55 For i 0 To nop1 1 tm i Val Mid mret 4 16 3 i 12 st i Mid mret 17 16 3 i 3 md i Val Mid mret 20 16 3 i 12 sc i Val Mid mret 36 16 3 i 12 data j i Chr 13 Chr 10 sc i md i 1000 tm i st i Next i...

Page 135: ...1 035 5 98927 NEI 1 6 2 261 6 00637 NEI 1 8 3 7695 6 02346 NEI 2 5 43 6 04055 NEI Data save completed Do you want to perform measurement again Check_err 68 session WriteString EMG err vbLf msg sessio...

Page 136: ...nels CN chnum chnum Disables channels CL chnum chnum Sets filter ON OFF FL mode chnum chnum Sets series resistor ON OFF SSR chnum mode Sets pulse timing parameters PT hold width period tdelay Sets aut...

Page 137: ...e 0 007 Dim vbcomp As Double 5 Dim ib As Double ib1 secondary sweep output value Dim d_ib As Double 0 secondary sweep step value delta If nop2 1 Then d_ib ib2 ib1 nop2 1 Dim hold As Double 0 Dim delay...

Page 138: ...R 1 vbLf err session ReadString 4 2 If err 0 Then session WriteString DZ vbLf GoTo Check_err session WriteString NUB vbLf rep session ReadString 3 2 57 If rep nop1 3 Then session WriteString DZ vbLf G...

Page 139: ...7 NCI 7 2 14 34 0 20387 NCI 7 2 5 14 53 0 22387 NCI 7 3 14 785 0 24387 NCI 7 3 5 15 22 0 26387 NCI 7 4 16 045 0 28387 NCI 7 4 5 17 565 0 30387 NCI 7 5 20 355 0 32387 NCI Data save completed session Wr...

Page 140: ...3 32 Keysight E5260 E5270 Programming Guide Edition 4 Programming Examples Pulsed Sweep Measurements Do you want to perform measurement again...

Page 141: ...els CL chnum chnum Sets filter ON OFF FL mode chnum chnum Sets series resistor ON OFF SSR chnum mode Sets auto abort function WM abort post Sets voltage sweep source WV chnum mode range start stop ste...

Page 142: ...0 Dim ib1 As Double 0 003 Dim ib2 As Double 0 007 Dim vbcomp As Double 5 Dim ib As Double ib1 secondary sweep output value Dim d_ib As Double 0 secondary sweep step value delta If nop2 1 Then d_ib ib2...

Page 143: ...r session ReadString 4 2 If err 0 Then session WriteString DZ vbLf GoTo Check_err session WriteString NUB vbLf rep session ReadString 3 2 56 If rep nop1 3 Then session WriteString DZ vbLf GoTo Check_n...

Page 144: ...I 7 2 14 345 0 20552 NCI 7 2 5 14 53 0 22552 NCI 7 3 14 785 0 24552 NCI 7 3 5 15 22 0 26552 NCI 7 4 16 045 0 28552 NCI 7 4 5 17 56 0 30552 NCI 7 5 20 365 0 32552 NCI Data save completed Do you want to...

Page 145: ...tion time Keysight E5270B can use AAD AIT instead of AV AV number mode AAD chnum type AIT type mode N Sets detection interval BDM interval mode Sets timing parameters BDT hold delay Sets quasi pulsed...

Page 146: ...0 Dim mrng As Integer 0 session WriteString FMT 1 vbLf 22 session WriteString CL t 1 t 3 vbLf session WriteString MM 9 t 2 vbLf 9 quasi pulsed spot session WriteString BDT hold delay vbLf session Writ...

Page 147: ...nop1 nop2 session t Exit Sub Check_err 43 session WriteString EMG err vbLf msg session ReadString 256 MsgBox Instrument error err Chr 10 msg vbOKOnly End Sub Line Description 33 to 37 Reads the retur...

Page 148: ...Sets filter ON OFF FL mode chnum chnum Sets series resistor ON OFF SSR chnum mode Sets integration time Keysight E5270B can use AAD AIT instead of AV AV number mode AAD chnum type AIT type mode N Sets...

Page 149: ...auto ranging Dim mrng As Integer 13 13 100 nA limited auto ranging Dim hold As Double 0 Dim delay As Double 0 Dim judge As Integer 1 1 result target Dim tgt As Double 0 001 target current Dim posneg...

Page 150: ...se 1000 status session WriteString DZ vbLf 48 save_data fname title value data nop1 nop2 session t Exit Sub Check_err 52 session WriteString EMG err vbLf msg session ReadString 256 MsgBox Instrument e...

Page 151: ...filter ON OFF FL mode chnum chnum Sets series resistor ON OFF SSR chnum mode Sets integration time Keysight E5270B can use AAD AIT instead of AV AV number mode AAD chnum type AIT type mode N Sets meas...

Page 152: ...13 13 100 nA limited auto ranging Dim hold As Double 0 Dim delay As Double 0 Dim mode As Integer 0 0 limit 1 repeat Dim judge As Double 0 000001 limit value in A Dim tgt As Double 0 001 target current...

Page 153: ...earch dsense 1000 status session WriteString DZ vbLf 48 save_data fname title value data nop1 nop2 session t Exit Sub Check_err 52 session WriteString EMG err vbLf msg session ReadString 256 MsgBox In...

Page 154: ...IT type mode N Sets sweep source timing parameter WT hold delay sdelay tdelay mdelay Sets auto abort function WM abort post Sets voltage sweep source WV chnum mode range start stop step comp Pcomp Set...

Page 155: ...nnel Sweep Measurement Example Sub perform_meas ByVal session As IMessage ByVal t As Integer 1 Dim i As Integer 0 t 0 Emitter Dim j As Integer 0 t 1 Base Dim nop1 As Integer 11 t 2 Collector Dim nop2...

Page 156: ...A session WriteString TSR vbLf session WriteString XE vbLf session WriteString OPC vbLf rep session ReadString 1 2 50 session WriteString ERR 1 vbLf err session ReadString 4 2 If err 0 Then session W...

Page 157: ...mret 36 16 5 i 12 st2 i Mid mret 49 16 5 i 3 md2 i Val Mid mret 52 16 5 i 12 sc i Val Mid mret 68 16 5 i 12 data j i Chr 13 Chr 10 sc i md1 i 1000 tm1 i st1 i md2 i 1000 tm2 i st2 i Next session Write...

Page 158: ...x ST and END Stores the program in the memory ST pnum command command END or ST pnum command command END SCR Scratches the program SCR pnum LST Gets a catalog of program numbers or a specific program...

Page 159: ...rogram delete the lines 13 to 39 from the program of Table 3 14 and insert the program lines 1 to 37 of Table 3 15 Also insert Table 3 15 s lines 39 to 49 between Table 3 14 s lines 53 and 54 The code...

Page 160: ...omp vbLf session WriteString DV t 0 orng vd idcomp vbLf session WriteString TI t 0 mrng vbLf session WriteString END vbLf display_mem session mem mem 2 27 session WriteString ST mem vbLf session Write...

Page 161: ...WriteString DZ vbLf 53 session WriteString CL vbLf session Close Exit Sub Check_err 58 session WriteString EMG ret vbLf msg session ReadString 256 MsgBox Instrument error ret Chr 10 msg vbOKOnly Exit...

Page 162: ...eString DV I1 I5 R1 R3 vbLf session WriteString DV I0 I5 R0 R2 vbLf session WriteString TI I0 I4 vbLf session WriteString END vbLf display_mem session mem mem 2 26 session WriteString ST mem vbLf sess...

Page 163: ...0 3 vbLf R0 vd For i 1 To 2 session WriteString DO i vbLf session WriteString OPC vbLf ret session ReadString 1 2 session WriteString ERR 1 vbLf ret session ReadString 4 2 If ret 0 Then session Write...

Page 164: ...ed terminal TGP port terminal polarity type TGPC Clears the trigger setting of the specified ports TGPC port port TGSI Selects the sweep step first or last that ignores the Start Step Output Setup tri...

Page 165: ...xt Trig In terminal WS mode WSX a Enters a wait state until the Keysight E5260 E5270 receives an external trigger via the specified port WSX port mode PA Pauses command execution or internal memory pr...

Page 166: ...1 Module Module1 Sub Main Dim B1500 As IResourceManager Dim unit1 As IMessage 5 B1500 New ResourceManager unit1 B1500 Open GPIB0 17 INSTR Dim E5270 As IResourceManager Dim unit2 As IMessage E5270 New...

Page 167: ...omp As Double 0 1 Dim ret As Integer unit1 WriteString FMT 1 vbLf unit1 WriteString TM 1 vbLf unit1 WriteString AV 1 vbLf unit1 WriteString MM 1 t 0 vbLf unit2 WriteString DV t 3 0 vs icomp vbLf unit2...

Page 168: ...Sub Line Description 55 to 57 Unit1 waits for a trigger sent to the Ext Trig In terminal and starts measurement by receiving a trigger sent by Unit2 59 to 61 The lines can be replaced with 55 to 57 De...

Page 169: ...ckReadWrite Print 1 value For j 0 To nop2 1 Print 1 Chr 13 Chr 10 Unit j 1 96 For i 0 To nop1 1 Print 1 data j i Next i Next j FileClose 1 Dim rbx As Integer For j 0 To nop2 1 value value Chr 10 Unit...

Page 170: ...m j As Integer 0 t 1 High1 Dim nop1 As Integer 5 t 2 High2 Dim nop2 As Integer 2 t 3 Low2 Dim data nop2 1 nop1 1 As String Dim value As String I mA Time msec Status Dim fname As String C Keysight prog...

Page 171: ...err 0 Then GoTo Check_err unit2 WriteString ERR 1 vbLf err unit2 ReadString 4 2 ret 2 If err 0 Then GoTo Check_err Line Description 22 to 25 Unit1 applies voltage to device and sets the sweep source t...

Page 172: ...2 17 i 16 2 3 meas Val Mid mret2 20 i 16 2 12 data 1 i Chr 13 Chr 10 meas 1000 time 1000 status Next i unit1 WriteString DZ vbLf unit2 WriteString DZ vbLf 64 save_data fname title value data nop1 nop2...

Page 173: ...ze the E5260 E5270 operation with the other instrument However this program does not include the program code to control the instrument So add the program code to control it before running the program...

Page 174: ...et to the measurement ready and 300 trigger wait condition 310 Line No Description 170 Specifies the data output format 180 Sets the number of averaging samples of the ADC 190 Sets the hold time and d...

Page 175: ...step measurement 510 520 NEXT I 530 540 OUTPUT E5270 CL 550 END Line No Description 320 Starts sweep measurement and performs a step measurement When the Keysight E5260 E5270 starts a step measuremen...

Page 176: ...22 or 25 data output format Enter the MM command to define the measurement mode and enter the TSC command to set the time stamp function ON You can get the time data with the measurement data The time...

Page 177: ...s the data and calculates the measured data 4 prints the measured data on the screen NOTE Data resolution The resolution of binary data is as shown below Measurement data Measurement range 50000 Outpu...

Page 178: ...r session ReadString 4 2 28 If err 0 Then session WriteString DZ vbLf GoTo Check_err session WriteString TI t 0 mrng vbLf Dim dat As Byte session Read 4 2 4 byte data terminator 31 Dim status As Integ...

Page 179: ...hr 13 Chr 10 range range value value Chr 13 Chr 10 count count Chr 13 Chr 10 Dim meas As Double 76 If type 0 Then meas count range 20000 source data If type 1 Then meas count range 50000 measurement d...

Page 180: ...ion refer to To Use Programs for Keysight 4142B on page 1 47 The following program examples show a modified measurement program which performs a high speed spot measurement The original 4142B program...

Page 181: ...OUTPUT Hp4142 DV D_ch 0 5 1 140 OUTPUT Hp4142 TI D_ch 0 150 ENTER Hp4142 USING 3X 12D X Mdata 160 PRINT Id A Mdata 170 OUTPUT Hp4142 CL 180 END 90 Specifies the data output format 100 to 130 Enables...

Page 182: ...CH command to translate the channel numbers if necessary 3 change the FMT command parameter value to use the data output format compatible with the 4155 4156 output data or change the program lines to...

Page 183: ...120 OUTPUT Hp415x DV S_ch 0 0 1 130 OUTPUT Hp415x DV B_ch 0 0 1 140 OUTPUT Hp415x DV G_ch 0 3 01 150 OUTPUT Hp415x DV D_ch 0 5 1 160 OUTPUT Hp415x TI D_ch 0 170 OUTPUT Hp415x RMD 1 180 ENTER Hp415x U...

Page 184: ...5x DV D_ch 0 5 1 160 OUTPUT Hp415x TI D_ch 0 170 OUTPUT Hp415x RMD 1 180 ENTER Hp415x USING 5X 13D X Mdata 190 PRINT Id A Mdata 200 OUTPUT Hp415x CL 210 END Line No Note 10 Change GPIB address if nece...

Page 185: ...4 Command Reference...

Page 186: ...nd description In this chapter plug in modules and accessory for the Keysight E5260 E5270 will be expressed by the model number or the following abbreviation as shown below E5280B HPSMU high power SMU...

Page 187: ...wait time has elapsed or until an event specified by the TM command is received TM Sets the event to start measurement or to release the E5260 E5270 from the paused status set by the PA or PAX comman...

Page 188: ...e data terminator BC Clears the E5260 E5270 output data buffer that stores measurement data and or query command response data Source Setup DI Forces current from the specified channel DV Forces volta...

Page 189: ...d WSV Sets the synchronous voltage sweep source used with the WV or PWV command Multichannel Sweep Source Setup WNX Sets the synchronous current sweep source or synchronous voltage sweep source used w...

Page 190: ...SI Sets the current source channel LSSI Sets the synchronous current source channel LGV Sets the voltage monitor channel LSV Sets the voltage source channel LSSV Sets the synchronous voltage source ch...

Page 191: ...lly Query ERR Returns error codes EMG Returns error message for the specified error code IDN Returns the instrument model number and the ROM version number LOP Returns the operation status of all modu...

Page 192: ...put terminal WS WSX Enters a wait state until the E5260 E5270 receives an external trigger via a trigger input terminal TM3 Enables use of an external trigger to release the PA PAX state or to start m...

Page 193: ...for DI TDI WI WSI WNX PI PWI LSI BSI Commands In the following tables the command parameters are put in italics such as chnum Table 4 1 Channel Number Mainframe chnum Description E5270B 2 3 4 6 7 8 HP...

Page 194: ...uses the minimum range that covers the compliance value 5 for E5281B E5287A 0 5 V limited auto ranging 50 for E5281B E5287A 5 V limited auto ranging 20 or 11 2 V limited auto ranging 200 or 12 20 V li...

Page 195: ...7A 1 nA limited auto ranging 12 for E5280B E5281B E5287A 10 nA limited auto ranging 13 100 nA limited auto ranging 14 1 A limited auto ranging 15 10 A limited auto ranging 16 100 A limited auto rangin...

Page 196: ...1 pA fixed range or the 1 pA limited auto ranging To enable the 1 pA range for the auto ranging mode execute the SAR command The E5270B automatically performs the compensation of the data measured by...

Page 197: ...range or irange Ranging type 0 Auto ranging 8 1 pA limited auto ranging for E5287A E5288A not available for pulsed output 9 10 pA limited auto ranging for E5287A not available for pulsed output 10 10...

Page 198: ...ulse in V Maximum Icomp value in A E5280B E5281B E5287A E5290A E5291A 0 5 V 25E 6 0 to 0 5 NA 100E 3 100E 3 NA NA 2 V 100E 6 0 to 2 1 100E 3 100E 3 1 200E 3 5 V 250E 6 0 to 5 NA 100E 3 100E 3 NA NA 20...

Page 199: ...115 E 12 100 1 nA 50E 15 0 to 1 15 E 9 200 100 100 10 nA 500E 15 0 to 11 5 E 9 200 100 100 100 nA 5E 12 0 to 115 E 9 200 100 100 200 100 1 A 50E 12 0 to 1 15E 6 200 100 100 200 100 10 A 500E 12 0 to 1...

Page 200: ...2 Describes the execution conditions if any exist 3 Describes the syntax 4 Lists the parameters 5 Shows the query response after command execution if there is a query command 6 Explains any additional...

Page 201: ...ecution Conditions Enter the AIT command to set up the ADC This command is not available for the Keysight E5260 series Syntax AAD chnum type Parameters chnum Measurement channel number The value must...

Page 202: ...llowing table Example Statements OUTPUT E5270 AB Operation before AB Setting after AB Staircase sweep measurement Sets specified start value Pulsed spot measurement Sets specified base value Pulsed sw...

Page 203: ...ar HP BASIC CLEAR command to end the operation If the AB command is entered in a command string the other commands in the string are not executed For example the CN command in the following command st...

Page 204: ...with actual Integer expression If you do not set program this command is the same as ACH n n If you do not set actual and program the all channel number mapping is cleared For parameter settings you c...

Page 205: ...n Conditions Enter the AAD command to specify the ADC type for each measurement channel This command is not available for the Keysight E5260 series Syntax AIT type mode N Parameters type A D converter...

Page 206: ...ing formula 1 to 100 Default value is 1 Number of averaging samples N 128 The Keysight E5270B gets 128 samples in a power line cycle repeats this for the times you specify and performs averaging to ge...

Page 207: ...ended on the mode value See below For negative number input this parameter specifies the number of power line cycles PLC for one point measurement The Keysight E5260 E5270 gets 128 samples in 1 PLC Ig...

Page 208: ...d Reference Table 4 9 Initial Number for Current Measurement Current Measurement Range Voltage Output Range a a For measurement channels that force current this is the minimum range that covers the vo...

Page 209: ...high speed A D converter Execution Conditions This command is not available for the Keysight E5260 series Syntax AZ mode Parameters mode Mode ON or OFF 0 OFF Disables the function Initial setting 1 ON...

Page 210: ...itions must be true to perform the measurement successfully When interval 0 A 1 V ms and B 3 s When interval 1 A 0 1 V ms and B 12 s where A means the slew rate when source output sweep was started an...

Page 211: ...nstrument never uses the range less than the specified range See Table 4 4 on page 4 13 start stop Start or stop voltage in V Numeric expression See Table 4 6 on page 4 14 0 to 100 or 0 to 200 for E52...

Page 212: ...ode setting range Measurement ranging type Integer expression The measurement range will be set to the minimum range that covers the target value For the limited auto ranging the instrument never uses...

Page 213: ...between the data at source start value and the last measurement data target is between the data at source stop value and the data at source value stop start 2 If the search cannot find the search tar...

Page 214: ...ds on the mode setting range Measurement ranging type Integer expression The measurement range will be set to the minimum range that covers the target value For the limited auto ranging the instrument...

Page 215: ...between the data at source start value and the last measurement data target is between the data at source stop value and the data at source value stop start 2 If the search cannot find the search tar...

Page 216: ...1 and 5 are not available for HPSMU See Table 4 1 on page 4 9 range Output ranging type Integer expression The output range will be set to the minimum range that covers both start and stop values For...

Page 217: ...completed the binary search sources force the value specified by the post parameter If the search operation is stopped by the automatic abort function the binary search sources force the start value...

Page 218: ...2 if Start Stop and the monitor channel executes a measurement If the search stop condition is not satisfied the measured data is used to decide the direction or of the next output change The value o...

Page 219: ...lue or Start D 2 if Start Stop and the monitor channel executes a measurement If the search stop condition is not satisfied the measured data is used to decide the direction or of the next output chan...

Page 220: ...r where the module has been installed Integer expression 1 to 8 1 and 5 are not available for HPSMU See Table 4 1 on page 4 9 polarity Polarity of the BSSI output for the BSI output 0 Negative BSSI ou...

Page 221: ...en installed Integer expression 1 to 8 1 and 5 are not available for HPSMU See Table 4 1 on page 4 9 polarity Polarity of the BSSV output for the BSV output 0 Negative BSSV output BSV output offset 1...

Page 222: ...d delay Parameters hold Hold time in seconds that is the wait time after starting the search measurement and before starting the delay time for the first search point Numeric expression 0 to 655 35 se...

Page 223: ...t available for HPSMU See Table 4 1 on page 4 9 range Output ranging type Integer expression The output range will be set to the minimum range that covers both start and stop values For the limited au...

Page 224: ...Data output mode Integer expression 0 Returns Data_search only initial setting 1 Returns Data_search and Data_sense where Data_search is the value forced by the search output channel set by the BSV or...

Page 225: ...in slot 3 and 4 slotnum must be 4 If you do not specify slotnum this command performs the self calibration for the mainframe and all modules If slotnum specifies the slot that installs no module this...

Page 226: ...rm the self calibration Integer expression 0 to 9 0 Mainframe and all modules Default setting 1 to 8 Module installed in the slot specified by slotnum 9 Mainframe For HPSMU that uses two slots set the...

Page 227: ...set Parameters chnum Channel number The value must be slot number where the module has been installed Integer expression 1 to 8 1 and 5 are not available for HPSMU See Table 4 1 on page 4 9 If you sp...

Page 228: ...tes Auto calibration is ON Output switches of all channels have been OFF for 30 minutes Syntax CM mode Parameters mode Auto calibration ON or OFF Integer expression 0 OFF 1 ON initial setting Remarks...

Page 229: ...4 1 on page 4 9 mode SMU measurement operation mode Integer expression 0 Compliance side measurement initial setting 1 SMU always performs current measurement 2 SMU always performs voltage measurement...

Page 230: ...ber The value must be slot number where the module has been installed Integer expression 1 to 8 1 and 5 are not available for HPSMU See Table 4 1 on page 4 9 If you specify multiple chnums the E5260 E...

Page 231: ...clear selects scientific Syntax DFM format Parameters format Data display format Integer expression Example Statements OUTPUT E5270 DFM 0 format Description 0 Engineering sign 6 digits numeric value...

Page 232: ...specified range See Table 4 5 on page 4 13 current Output current value in A Numeric expression See Table 4 7 on page 4 15 0 to 0 1 0 to 0 2 for E5291A or 0 to 1 for E5280B E5290A Vcomp Voltage compl...

Page 233: ...parameter is effective for item 1 and 4 0 Keysight E5260 E5270 starts diagnostics immediately 1 Keysight E5260 E5270 starts diagnostics when the Enter key is pressed If you do not specify pause 1 is s...

Page 234: ...result returns 0 If the LED does not blink press the Exit key to stop result returns 1 Before starting the digital I O diagnostics disconnect any cable from the digital I O port After starting the bee...

Page 235: ...than the specified range See Table 4 4 on page 4 13 voltage Output voltage value in V Numeric expression See Table 4 6 on page 4 14 0 to 100 or 0 to 200 for E5280B E5290A Icomp Current compliance valu...

Page 236: ...1 and 5 are not available for HPSMU See Table 4 1 on page 4 9 If you specify multiple chnums the E5260 E5270 sets the channels to 0 V in the specified order If you do not specify chnum the DZ command...

Page 237: ...de returned by the ERR command Numeric expression Query Response Error message CR LF EOI For the error codes and error messages refer to Chapter 5 Error Messages Example Statements OUTPUT E5270 EMG 10...

Page 238: ...t If you set 1 that is effective for the Keysight 4142B an error occurs value Decimal value of the output status bit pattern Integer expression 0 to 65535 The bit pattern must comply with the followin...

Page 239: ...f the port setting Integer expression 0 to 65535 The setting of each port must be designated by 0 or 1 that has the following meaning 0 Output port 1 Input port Example Statements If you want to use t...

Page 240: ...output mode Integer expression 0 default setting or 1 0 Returns up to four error codes in order from their occurrence 1 Returns one error code If you do not specify mode the ERR command returns four e...

Page 241: ...ns the decimal value of the port status The status of each port is designated by 0 or 1 that has the following meaning 0 TTL high level approx 2 4 V 1 TTL low level approx 0 8 V Example Statements OUT...

Page 242: ...ode chnum chnum chnum A maximum of eight channels can be set Parameters mode Status of the filter Integer expression 0 Disconnect initial setting 1 Connect chnum Channel number The value must be slot...

Page 243: ...r expression 1 to 5 11 12 15 21 22 or 25 See Table 4 11 mode Source data output mode Integer expression 0 to 8 See Table 4 10 You can select the source data returned with the measurement data If you d...

Page 244: ...put Format on page 1 22 format Data format Terminator 1 a a Compatible with the Keysight 4142B data output format ASCII 12 digits data with header CR LF EOI 2 a ASCII 12 digits data without header CR...

Page 245: ...and the ROM version number then stores the results in the output data buffer query buffer Syntax IDN Query Response Agilent Technologies model 0 ROM rev CR LF EOI Example Statements OUTPUT E5270 IDN E...

Page 246: ...1 on page 4 9 If you specify multiple chnums the E5260 E5270 sets the channels to 0 V in the specified order If you do not specify chnum this command sets all channels to 0 V in order from higher vol...

Page 247: ...mmand Reference KLC The KLC command locks or unlocks the front panel keys The RST command or the device clear unlocks the front panel keys Syntax KLC mode Parameters mode Front panel key lock or unloc...

Page 248: ...eger expression 1 to 8 1 and 5 are not available for HPSMU See Table 4 1 on page 4 9 mode Search mode Integer expression 0 If the measured value target it is the search result data 1 If the measured v...

Page 249: ...talled Integer expression 1 to 8 1 and 5 are not available for HPSMU See Table 4 1 on page 4 9 mode Search mode Integer expression 0 If the measured value target it is the search result data 1 If the...

Page 250: ...two slots two variables will be returned Then the first one is always 00 and the last one indicates the module status For example LOP00 11 00 00 00 00 00 00 will be returned when only the HPSMU instal...

Page 251: ...r expression A description and the query response of each type is described below 0 Returns the output switch ON OFF status CN chnum chnum chnum CR LF EOI where chnum is the channel number for the cha...

Page 252: ...ange RV chnum Vrange RI chnum Irange RV chnum Vrange RI chnum Irange RV chnum Vrange CR LF EOI 33 Returns the staircase sweep measurement settings WM automatic sweep abort function output after sweep...

Page 253: ...o another numbers ACH actual program ACH actual program ACH actual program CR LF EOI If no channel number is defined by the ACH command ACH CR LF EOI 41 to 45 Not used 46 Returns SMU measurement opera...

Page 254: ...CR LF EOI 52 Not used 53 Returns the SMU series resistor ON OFF status SSR chnum mode SSR chnum mode SSR chnum mode CR LF EOI 54 Returns the auto ranging mode status RM chnum mode rate RM chnum mode...

Page 255: ...pcomp WNX n chnum mode range start stop comp pcomp WNX n chnum mode range start stop comp pcomp CR LF EOI If no multi channel sweep source is set the query response is WNX CR LF EOI 60 Returns the tim...

Page 256: ...pA auto ranging operation mode SAR chnum mode SAR chnum mode SAR chnum mode CR LF EOI If no channel is connected to ASU SAR CR LF EOI 64 Available only for the Keysight E5270B with HRSMU and ASU Retu...

Page 257: ...anging type Integer expression The output range will be set to the minimum range that covers both start and stop values For the limited auto ranging the instrument never uses the range less than the s...

Page 258: ...the search measurement is normally completed the linear search sources force the value specified by the post parameter If the search operation is stopped by the automatic abort function the linear sea...

Page 259: ...where the module has been installed Integer expression 1 to 8 1 and 5 are not available for HPSMU See Table 4 1 on page 4 9 polarity Polarity of the LSSI output for the LSI output 0 negative LSSI outp...

Page 260: ...been installed Integer expression 1 to 8 1 and 5 are not available for HPSMU See Table 4 1 on page 4 9 polarity Polarity of the LSSV output for the LSV output 0 negative LSSV output LSV output offset...

Page 261: ...he END command If the index value is greater than the number of commands the LST returns the END only If you set index 0 the LST returns the number of commands stored in the memory program For empty m...

Page 262: ...mple Statements Example of LST DIM A 100 OUTPUT E5270 LST ENTER E5270 A PRINT A Example of LST pnum index size DIM A 100 P_num 1 OUTPUT E5270 LST P_num 0 ENTER E5270 Num_c Num_l Num_c 3000 IF Num_c 30...

Page 263: ...elay Parameters hold Hold time in seconds that is the wait time after starting the search measurement and before starting the delay time for the first search point Numeric expression 0 to 655 35 sec 0...

Page 264: ...tput range will be set to the minimum range that covers both start and stop values Range changing may cause 0 V output in a moment For the limited auto ranging the instrument never uses the range less...

Page 265: ...channel set by the LSV or LSI command Data_sense is the value measured by the search monitor channel set by the LGI or LGV command For data output format refer to Data Output Format on page 1 22 Exam...

Page 266: ...and linear search MM mode For quasi pulsed spot MM mode chnum Parameters mode Measurement mode Integer expression 1 to 5 9 and 14 to 16 chnum Measurement channel number The value must be slot number w...

Page 267: ...mmand For the Keysight E5270B note that the high resolution ADC cannot perform simultaneous measurement For the quasi pulsed spot measurement if you do not specify chnum the E5260 E5270 uses the chann...

Page 268: ...4 84 Keysight E5260 E5270 Programming Guide Edition 4 Command Reference Command Reference Example Statements OUTPUT E5270 MPA 2...

Page 269: ...onitors the pending operations and places ASCII character 1 into the output queue when all pending operations are completed Also this command sets clears the operation complete OPC bit in the standard...

Page 270: ...d port Syntax OSX port level Parameters port External trigger output port number Integer expression 2 or 1 to 16 2 Ext Trig Out terminal 1 to 16 Port 1 to 16 of the digital I O terminal To use a digit...

Page 271: ...tive wait time is set the paused status is kept until receiving an event specified by the TM command Remarks The TM3 command enables an external trigger from the Ext Trig In terminal as an event used...

Page 272: ...command The port value must be same as the port value set to the TGP command wait time 99 9999 to 99 9999 seconds with 100 sec resolution Numeric expression If wait time is not specified or negative w...

Page 273: ...e slot number where the module has been installed Integer expression 1 to 8 1 and 5 are not available for HPSMU See Table 4 1 on page 4 9 irange Ranging type for pulse current output Integer expressio...

Page 274: ...ld width period Tdelay Parameters hold Hold time in seconds Numeric expression 0 to 655 35 sec 10 ms resolution Initial setting 0 width Pulse width in seconds Numeric expression 0 5 ms to 2 0 s 0 1 ms...

Page 275: ...l number The value must be slot number where the module has been installed Integer expression 1 to 8 1 and 5 are not available for HPSMU See Table 4 1 on page 4 9 vrange Ranging type for the pulsed vo...

Page 276: ...on 1 or 3 1 Linear sweep single stair start to stop 3 Linear sweep double stair start to stop to start range Ranging type for pulsed current sweep Integer expression The output range will be set to th...

Page 277: ...5270 Programming Guide Edition 4 4 93 Command Reference Command Reference Example Statements OUTPUT E5270 PT 1 0 01 OUTPUT E5270 PWI 1 1 0 0 0 0 1 101 OUTPUT E5270 PT 1 0 01 OUTPUT E5270 PWI 2 3 13 0...

Page 278: ...4 9 mode Sweep mode Integer expression 1 or 3 1 Linear sweep single stair start to stop 3 Linear sweep double stair start to stop to start range Ranging type for pulsed voltage sweep Integer expressio...

Page 279: ...E5270 Programming Guide Edition 4 4 95 Command Reference Command Reference Example Statements OUTPUT E5270 PT 1 0 01 OUTPUT E5270 PWV 1 1 0 0 0 10 101 OUTPUT E5270 PT 1 0 01 OUTPUT E5270 PWV 2 3 14 0...

Page 280: ...Default setting 1 to 8 Module installed in the slot specified by slotnum 9 ADC module installed in the mainframe For HPSMU that uses two slots set the greater slot number For example if it is installe...

Page 281: ...ble 4 1 on page 4 9 range Measurement range or ranging type Integer expression If you select the fixed range the instrument performs measurement by using the specified range For the auto or limited au...

Page 282: ...current2 are given by the following formula current1 measurement range rate 100 current2 measurement range rate 1000 For 200 mA range they must be current1 200 mA rate 100 current2 100 mA rate 100 Fo...

Page 283: ...ommand then the RST command Example Statement OUTPUT E5270 RST RU The RU command sequentially executes the internal memory programs Execution Conditions The specified programs have been stored by usin...

Page 284: ...nel number The value must be slot number where the module has been installed Integer expression 1 to 8 1 and 5 are not available for HPSMU See Table 4 1 on page 4 9 range Measurement range or ranging...

Page 285: ...R command has not been executed for the specified channel Syntax RZ chnum chnum chnum A maximum of eight channels can be set Parameters chnum Channel number The value must be slot number where the mod...

Page 286: ...igh resolution SMU HRSMU and the Atto Sense and Switch Unit ASU This command is not effective when the HIGH VOLTAGE indicator of the Keysight E5270B has been lighted Controls the connection path of th...

Page 287: ...ing operation Remember that the series resistor in the HRSMU connected to the ASU cannot be used SAR The Keysight E5260 series does not support this command This command is available for the Keysight...

Page 288: ...e module has been installed Integer expression 1 to 8 1 and 5 are not available for HPSMU See Table 4 1 on page 4 9 Example Statements OUTPUT E5270 SCH 1 SCR The SCR command scratches the specified pr...

Page 289: ...the source compliance value in the second line Syntax SPA line item Parameters line Line or position the parameter value is displayed Integer expression 1 First line 2 Second line item Parameter disp...

Page 290: ...rresponding to the bits to be enabled Integer expression 0 to 255 See the following table For example to enable Bit 0 4 and 7 for the SRQ the bit value must be 145 1 16 128 If bit 0 all bits except fo...

Page 291: ...x SRE Query Response enabled_bits CR LF EOI enabled_bits are represented by the corresponding decimal values shown below For example if Bit 0 3 and 4 are enabled for the SRQ 25 1 8 16 will be returned...

Page 292: ...r Thus the voltage will be divided by the series resistor and the device under test Execution Conditions The series resistor cannot be used for the measurements that use the high resolution SMU HRSMU...

Page 293: ...is not included the E5260 E5270 stores the commands until the program memory is full Use the DO or RU command to execute stored programs Syntax STpnum command command command END or ST pnum command co...

Page 294: ...oes not clear the status byte the SPOLL command clears the status byte Syntax STB Query Response status_byte CR LF EOI status_byte value is a decimal number that indicates which bits of the status byt...

Page 295: ...auto ranging the instrument never uses the range less than the specified range See Table 4 5 on page 4 13 current Output current value in A Numeric expression See Table 4 7 on page 4 15 0 to 0 1 0 to...

Page 296: ...auto ranging the instrument never uses the range less than the specified range See Table 4 4 on page 4 13 voltage Output voltage value in V Numeric expression See Table 4 6 on page 4 14 0 to 100 or 0...

Page 297: ...Edge trigger or gate trigger Integer expression 1 Edge trigger initial setting 2 Gate trigger Example Statements OUTPUT E5270 TGMO 2 See Also TGP and TGPC Figure 4 2 Trigger Output Example Staircase...

Page 298: ...2 or 3 Selects the function of the trigger port See Table 4 12 If this parameter is not specified type is set to 0 Remarks The function of type 0 is effective for all trigger ports regardless of the t...

Page 299: ...trigger is received the E5260 E5270 starts the output setup at each sweep step or the pulsed output setup This function is available for the staircase sweep pulsed sweep staircase sweep with pulsed b...

Page 300: ...6 of the digital I O terminal Remarks The TGPC command sets the trigger ports as shown below Ext Trig In Same as after TGP 1 1 2 0 command execution Ext Trig Out Same as after TGP 2 2 2 0 command exec...

Page 301: ...l setting 2 Case 2 Case 1 waits for a trigger for the first sweep step and does not wait for a trigger for the source output after sweep Case 2 does not wait for a trigger for the first sweep step and...

Page 302: ...multi channel sweep measurements Syntax TGSO mode Parameters mode Edge trigger or gate trigger Integer expression 1 Edge trigger initial setting 2 Gate trigger Example Statements OUTPUT E5270 TGSO 2 S...

Page 303: ...measurement by using the specified range For the auto or limited auto ranging the measurement range will be set to the minimum range that covers the measured values However the instrument never uses t...

Page 304: ...e E5260 E5270 is not in the wait status set by the PA PAX WS or WSX command the E5260 E5270 can start the measurement by an external trigger input After measurement the E5260 E5270 sends a trigger to...

Page 305: ...rameters mode Time stamp function mode Integer expression When the function is enabled the E5260 E5270 returns the time data with the measurement data The time data is the time from when the timer is...

Page 306: ...format Refer to FMT on page 4 59 Syntax TSQ Example Statements OUTPUT E5270 TSQ ENTER E5270 USING 5X 13D X Time PRINT Time Time s TSR The TSR command clears the timer count This command is effective f...

Page 307: ...ule to test Integer expression 0 to 9 0 Mainframe and all modules Default setting 1 to 8 Module installed in the slot specified by slotnum 9 Mainframe For HPSMU that uses two slots set the greater slo...

Page 308: ...n page 4 9 range Measurement range or ranging type Integer expression If you select the fixed range the instrument performs measurement by using the specified range For the auto or limited auto rangin...

Page 309: ...he best resolution 100 s the timer must be cleared every 100 sec or less for the FMT1 2 or 5 data output format or every 1000 sec or less for the FMT 11 12 15 21 22 or 25 data output format Example St...

Page 310: ...ranging type Integer expression If you select the fixed range the instrument performs measurement by using the specified range For the auto or limited auto ranging the measurement range will be set t...

Page 311: ...HPSMU See Table 4 1 on page 4 9 range Measurement range or ranging type Integer expression If you select the fixed range the instrument performs measurement by using the specified range For the auto o...

Page 312: ...xpression 0 Returns information for all modules 1 Returns information for all modules with control unit If you do not specify this parameter the mode is set to 0 Query Response part number of control...

Page 313: ...able Numeric value The value must be 6 digits or less Available values are as follows For integer variables 999999 to 999999 For real variables 9999 9 to 9999 9 Example Statements OUTPUT E5270 ST1 CN1...

Page 314: ...ive for all modules Syntax WAT type N offset Parameters type Type of the wait time Integer expression 1 or 2 1 Source wait time before changing the output value 2 Measurement wait time before starting...

Page 315: ...may start before device characteristics stable If too long time will be wasted The initial wait time may be too short for measurements of high capacitance or slow response devices Then set the wait t...

Page 316: ...r sweep mode 1 or 3 is available for the staircase sweep with pulsed bias 1 Linear sweep single stair start to stop 2 Log sweep single stair start to stop 3 Linear sweep double stair start to stop to...

Page 317: ...s automatically set to the same polarity as the output value regardless of the specified Vcomp If the output value is 0 the polarity is set to positive If you set Pcomp the maximum Vcomp value for the...

Page 318: ...by the post parameter and the pulsed sweep source forces the pulse base value If the measurement is stopped by the automatic abort function the staircase sweep sources force the start value and the pu...

Page 319: ...V PWI or PWV and stores the results in the output data buffer query buffer Execution Conditions If you want to know the number of steps for a pulsed sweep you must execute an MM 4 command before using...

Page 320: ...s below chnum Sweep source channel number The value must be slot number where the module has been installed Integer expression 1 to 8 1 and 5 are not available for HPSMU See Table 4 1 on page 4 9 mode...

Page 321: ...e the same polarity for log sweep Sweep mode linear or log and the number of sweep steps are set by the WI or WV command comp Compliance in A or V Numeric expression If you do not set comp the previou...

Page 322: ...es simultaneously start output by a trigger such as the XE command However if a sweep source sets power compliance or forces logarithmic sweep current the sweep sources start output in the order speci...

Page 323: ...hecks its trigger flag to confirm the present trigger status received or none To clear the trigger flag Enter the RST or device clear command HP BASIC CLEAR statement Enter the TM3 command Enter the T...

Page 324: ...ge Ranging type for synchronous sweep current output Integer expression See Table 4 5 on page 4 13 For the linear sweep the E5260 E5270 uses the minimum range that covers both start and stop values to...

Page 325: ...or the log sweep and without Pcomp set the value available for the minimum range that covers start and stop values Pcomp Power compliance in W Numeric expression Resolution 0 001 W If the Pcomp value...

Page 326: ...p voltage output Integer expression See Table 4 4 on page 4 13 The E5260 E5270 usually uses the minimum range that covers both start and stop values to force the staircase sweep voltage However if you...

Page 327: ...he module is allowed regardless of the output range setting Pcomp Power compliance in W Numeric expression Resolution 0 001 W If the Pcomp value is not entered the power compliance is not set 0 001 to...

Page 328: ...e set to the TGP command mode Waiting mode Integer expression 1 or 2 If this parameter is not specified mode is set to 1 Remarks The E5260 E5270 checks its trigger flag to confirm the present trigger...

Page 329: ...ase sweep with pulsed bias measurements Syntax WT hold delay Sdelay Tdelay Mdelay Parameters hold Hold time in seconds that is the wait time after starting the sweep measurement and before starting th...

Page 330: ...r Numeric expression 0 to delay with 0 1 ms resolution If this parameter is not specified Tdelay is set to 0 Mdelay Step measurement trigger delay time in seconds that is the wait time after receiving...

Page 331: ...gle stair start to stop 2 Log sweep single stair start to stop 3 Linear sweep double stair start to stop to start 4 Log sweep double stair start to stop to start range Ranging type for staircase sweep...

Page 332: ...not set Icomp the previous value is used Compliance polarity is automatically set to the same polarity as the output value regardless of the specified Icomp If the output value is 0 the compliance po...

Page 333: ...arameters timeout Timeout Numeric expression 0 to 655 35 sec with 0 01 sec resolution With timeout parameter this command waits until the all channel output becomes within 2 V or until the specified t...

Page 334: ...and to start measurement There is no execution condition when you use the XE command to recover from the wait state If any channel is set to the HIGH VOLTAGE state forcing more than 42 V or voltage co...

Page 335: ...5 Error Messages...

Page 336: ...us code and the error code of the Keysight E5260 E5270 Channel Status Code Error Codes If error occurs find solutions in the following sections and solve problems However if problems still remain perf...

Page 337: ...measurement channel and is displayed in the channel status area on the LCD No status code is displayed if the Keysight E5260 E5270 is in the normal condition X One or more channels are oscillating V M...

Page 338: ...ax Correct the data syntax 103 Incorrect terminator position Correct the command syntax The number of parameters will be incorrect 120 Incorrect parameter value Correct the parameter value 121 Channel...

Page 339: ...e service purpose execute the RCV command to enable the module 153 No module for the specified channel Module is not installed in the slot specified by the channel number 160 Incorrect ST execution Th...

Page 340: ...nel The channel output switch cannot be set to ON in the high voltage state Set the output voltage or the voltage compliance to 42 V or less to set the switch to ON 204 Cannot disable channel The chan...

Page 341: ...sweep source Before triggering the staircase sweep measurement triggering the staircase sweep with pulsed bias measurement or sending the WSV WSI or WNX command to set the synchronous sweep source sen...

Page 342: ...command to set the pulse source 231 Compliance must be set correctly Compliance was not set or an incorrect compliance value was set in the PV PI PWV or PWI command Set the correct compliance value e...

Page 343: ...be set to the same output mode voltage or current 274 Search sync source is overflow Set the search sources so that the same output range is set to both primary and synchronous search sources 275 Sea...

Page 344: ...in the high voltage condition Any module may be defective Perform self test 311 ASU control cable was connected disconnected The E5270B must be turned off when the Atto Sense and Switch Unit ASU is co...

Page 345: ...000 or more For the binary search measurement The limit value for the search target must be range 20000 or more where range means the measurement range actually used for the measurement 650 Data forma...

Page 346: ...test 705 CPU failed SRQ status signal test 706 CPU failed high voltage status signal test 707 CPU failed low voltage status signal test 708 CPU failed DAC settling status signal test 709 CPU failed m...

Page 347: ...on N771 SMU failed VF offset calibration N772 SMU failed VF gain calibration N773 SMU failed VF gain calibration at 20 V range N774 SMU failed VF filter offset calibration N775 SMU failed H SPEED ADC...

Page 348: ...t E5260 E5270 Programming Guide Edition 4 Error Messages Error Codes N789 SMU failed high voltage detector test N790 SMU failed zero voltage detector test N791 SMU failed V hold test N792 SMU failed V...

Page 349: ......

Page 350: ...This information is subject to change without notice Keysight Technologies 2004 2007 2008 2014 Edition 4 October 2014 E5260 90010 E5260 90010 www keysight com...

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