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11 Reliability
11.20 EM Istress2[6]: Electromigration test, current stressed, 6 SMUs (A.03.10)
[Supported Analyzer]
B1500A
[Description]
Performs the Electromigration (EM) test for a wiring device with extrusion lines, and plots the stress time vs
resistance characteristics. This test is performed by the sampling measurement mode as shown below.
1. applies stress current
2. performs measurement and saves measurement data
3. calculates the device failure time
[Device Under Test]
Wiring device with extrusion lines, 6 terminals
[Device Parameters]
L: Length of pattern
W: Width of pattern
Temp: Temperature
[Test Parameters]
Port1: SMU connected to Port1, constant current output
Port2: SMU connected to Port2, constant voltage output
Port3: SMU connected to Extrusion Line, constant voltage output
Port4: SMU connected to Extrusion Line, constant voltage output
VM1: SMU for Port1 voltage monitoring, constant voltage output
VM2: SMU for Port2 voltage monitoring, constant voltage output
TotalStressTime: Total stress time.
FailureCondition: Measurement stop condition 1 (%changes of wire resistance)
ExtCondition: Measurement stop condition 2 (current to extrusion line)
I1Stress: Port1 stress current
IntegTime: Integration time
V1Limit: Port1 voltage compliance
I3Limit: Port3 current compliance
I4Limit: Port4 current compliance
PointPerDecade: Number of samples in 1 decade
Interval: Sampling interval
[Extended Test Parameters]
V2: Port2 voltage
V3: Port3 voltage
V4: Port4 voltage
I2Limit: Port2 current compliance
HoldTime: Hold time
Port2MinRng: Minimum range for Port2 current measurement
Port3MinRng: Minimum range for Port3 current measurement
Port4MinRng: Minimum range for Port4 current measurement
R_Max: Y axis maximum value for resistance
StoreOfRuntimeData: Data save during stress output, Yes or No
[Measurement Parameters]
Port1 voltage Vm1
Port2 voltage Vm2
Port2 current Iport2
Agilent EasyEXPERT Application Library Reference, Edition 8
11-50