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11 Reliability
11.16 EM Istress2: Electromigration test, current stressed, 4 SMUs (A.03.10)
[Supported Analyzer]
B1500A
[Description]
Performs the Electromigration (EM) test, and plots the stress time vs resistance characteristics. This test is
performed by the sampling measurement mode.
[Device Under Test]
Wiring (resistor), 4 terminals
[Device Parameters]
L: Length of pattern
W: Width of pattern
Temp: Temperature
[Test Parameters]
Port1: SMU for Port1 stress force
Port2: SMU for Port2 stress force
VM1: SMU for Port1 voltage monitor
VM2: SMU for Port2 voltage monitor
TotalStressTime: Total stress time.
V1Limit: Port1 voltage compliance
FailureCondition: Measurement stop condition (%changes of wire resistance)
I1Stress: Port1 stress current
NoOfSamples: Number of samples
IntegTime: Integration time
PointPerDecade: Number of samples in 1 decade
Interval: Sampling interval
[Extended Test Parameters]
V2: Port2 terminal voltage
I2Limit: Port2 current compliance
HoldTime: Hold time
R_Max: Y axis maximum value for resistance
StoringRuntimeData: Data save during stress output, Yes or No
[Measurement Parameters]
Port1 current Iport1
[User Function]
DeltaV Voltage between terminals of wiring device
R Resistance of wiring device
MaxTime Maximum elapsed time
[X-Y Graph]
X axis: Stress time Time (LOG)
Y1 axis: Voltage between terminals of wiring device DeltaV (LINEAR)
Y2 axis: Resistance of wiring device R (LINEAR)
Agilent EasyEXPERT Application Library Reference, Edition 8
11-43