Agilent Technologies EasyEXPERT, Руководство пользователя, Страница: 109 / 610

2 CMOS
2.30 VthAndCgg-Vg ASU: Cgg-Vg, Id-Vg, using ASU (A.01.20)
[Supported Analyzer]
B1500A
[Description]
Measures the gate capacitance vs gate voltage characteristics, the drain current vs gate voltage measurement
by using one MFCMU, two sets of HRSMU/ASU, and one SMU.
For a more accurate measurement, perform correction data measurement at the measurement frequency before
starting the capacitance measurement.
If the measurement frequency is not included in the list of default frequencies below, click the Advanced
Options... button and set the measurement frequency on the Frequency area of the Advanced Options for CMU
Calibration window.
Default frequencies:
1 k, 2 k, 5 k, 10 k, 20 k, 50 k, 100 k, 200 k, 500 k, 1 M, 1.2 M, 1.5 M, 2 M, 2.5 M, 2.7 M, 3 M, 3.2 M, 3.5 M,
3.7 M, 4 M, 4.2 M, 4.5 M, 5 MHz
[Device Under Test]
MOSFET, 4 terminals
[Required Modules and Accessories]
One MFCMU module, two sets of HRSMU/ASU, and one SMU module are required.
ASU#1 connections: Output: Gate, SMU: HRSMU, AUX: MFCMU Low
ASU#2 connections for Cgg-Vg: Output: other 3 terminals, SMU: HRSMU, AUX: MFCMU High
ASU#2 connections for Id-Vg: Output: Source and Substrate, SMU: HRSMU, AUX: MFCMU High
Connection wire must be connected between the CMU Return terminals of ASUs.
Setting of ASU I/O Path, ASU tab, Configuration window: AUX
[Device Parameters]
Polarity: Nch (CMU/SMU forces the specified value) or Pch (CMU/SMU forces the negative specified value).
Lg: Gate length
Wg: Gate width
Temp: Temperature
[Test Parameters]
GateAC: CMU connected to Gate terminal (CV sweep measurement)
GateDC: SMU connected to Gate terminal (primary sweep, voltage output)
SourceDC: SMU connected to Source and Substrate terminal (constant voltage output)
Drain: SMU connected to Drain terminal (constant voltage output)
IntegTime: Integration time
IgLimit: Gate current compliance
IdLimit: Drain current compliance
IsubsLimit: Substrate current compliance
HoldTime: Hold time
DelayTime: Delay time
VgsBiasStart: Cgg-Vg measurement start voltage
VgsBiasStop: Cgg-Vg measurement stop voltage
VgsBiasStep: Cgg-Vg measurement step voltage
OscLevel: Cgg-Vg measurement signal level
FREQ: Cgg-Vg measurement frequency
VgsStartDC: Id-Vg measurement start voltage
VgsStopDC: Id-Vg measurement stop voltage
VgsStepDC: Id-Vg measurement step voltage
Agilent EasyEXPERT Application Library Reference, Edition 8
2-47