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7 MixedSignal
7.17 MIM CV Mismatch: MIM capacitor C-V characteristics mismatch (A.01.11)
[Supported Analyzer]
B1500A
[Description]
Measures the MIM capacitance (C-V characteristics) of device A, and measures the C-V characteristics of
device B. After that, calculates the differences between capacitance values by using the following formula, and
plots the results.
DeltaCp=(CpBList-CpAList)/CpAList*100 for parallel capacitance
DeltaCs=(CsBList-CsAList)/CsAList*100 for series capacitance
For a more accurate measurement, perform correction data measurement at the measurement frequency before
starting the capacitance measurement.
If the measurement frequency is not included in the list of default frequencies below, click the Advanced
Options... button and set the measurement frequency on the Frequency area of the Advanced Options for CMU
Calibration window.
Default frequencies:
1 k, 2 k, 5 k, 10 k, 20 k, 50 k, 100 k, 200 k, 500 k, 1 M, 1.2 M, 1.5 M, 2 M, 2.5 M, 2.7 M, 3 M, 3.2 M, 3.5 M,
3.7 M, 4 M, 4.2 M, 4.5 M, 5 MHz
[Device Under Test]
MIM capacitor, 2 terminals, 2 ea.
[Device Parameters]
Lg: Device length
Wg: Device width
Temp: Temperature
[Test Parameters]
IntegTime: Integration time
FREQ: Measurement frequency
OscLevel: Measurement signal level
Port1: CMU connected to the device (CV sweep measurement)
V1Start: DC bias start voltage
V1Stop: DC bias stop voltage
V1Step: DC bias step voltage
[Extended Test Parameters]
HoldTime: Hold time
DelayTime: Delay time
[Measurement Parameters]
Parallel capacitance Cp
Conductance G
[User Function]
To specify the device, A or B is added to the actual variable names.
PI=3.141592653589
Dval=Gval/(2*PI*FREQ*Cpval)
Rpval=1/Gval
Csval=(1+Dval^2)*Cpval
Agilent EasyEXPERT Application Library Reference, Edition 8
7-33