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7 MixedSignal
7.2 Diff-R Mismatch: Diffusion resistor R-I characteristics mismatch, Kelvin
conneciton (A.01.11)
[Supported Analyzer]
B1500A
[Description]
Measures the resistance vs input current characteristics of diffusion resistors, and plots the differences between
the devices.
[Device Under Test]
Resistor, 2 terminals, 2 ea.
with substrate
[Device Parameters]
Polarity: Ntype (SMUs force the specified value) or Ptype (SMUs force the negative specified value).
L: Resistor length
W: Resistor width
Temp: Temperature
[Test Parameters]
IntegTime: Integration Time
Port1: SMU connected to device A high terminal, primary sweep current output
Port2: SMU connected to device B high terminal, synchronous sweep current output
I1Start: Port1/Port2 sweep start current
I1Stop: Port1/Port2 sweep stop current
I1Step: Port1/Port2 sweep step current
Port3: SMU connected to device A/B low terminal, constant voltage output
Subs: SMU connected to Substrate, constant voltage output
VM1: SMU connected to device A high terminal, constant current output
VM2: SMU connected to device A low terminal, constant current output
VM3: SMU connected to device B high terminal, constant current output
VM4: SMU connected to device B low terminal, constant current output
[Extended Test Parameters]
IM1: VM1 output current
IM2: VM2 output current
IM3: VM3 output current
IM4: VM4 output current
V3: Port3 output voltage
Vsubs: Substrate voltage
V1Limit: Port1 voltage compliance
VM1Limit: VM1 voltage compliance
I3Limit: Port3 current compliance
IsubsLimit: Substrate current compliance
HoldTime: Hold time
DelayTime: Deley time
[Measurement Parameters]
Device A input current Iport1
Device B input current Iport2
Device A terminal voltage Vvm1, Vvm2
Device B terminal voltage Vvm3, Vvm4
Agilent EasyEXPERT Application Library Reference, Edition 8
7-5