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11 Reliability
11.15 EM Istress: Electromigration test, current stressed, 4 SMUs (A.01.20)
[Supported Analyzer]
B1500A
[Description]
Performs the Electromigration (EM) test, and plots the stress time vs resistance characteristics. This test is
performed by the sampling measurement mode.
[Device Under Test]
Wiring (resistor), 4 terminals
[Device Parameters]
L: Length of pattern
W: Width of pattern
Temp: Temperature
[Test Parameters]
Port1: SMU for Port1 stress force
Port2: SMU for Port2 stress force
VM1: SMU for Port1 voltage monitor
VM2: SMU for Port2 voltage monitor
TotalStressTime: Total stress time.
StopCondition: Measurement stop condition (%changes of wire resistance)
I1Stress: Port1 stress current
IntegTime: Integration time
[Extended Test Parameters]
V2: Port2 terminal voltage
V1Limit: Port1 voltage compliance
I2Limit: Port2 current compliance
HoldTime: Hold time
[User Function]
IPort1PerArea (A/cm2) Port1 terminal current per unit area
IPort2PerArea (A/cm2) Port2 terminal current per unit area
R (ohm) Resistance of wiring
DeltaR (%) Difference from initial resistance
[X-Y Plot]
X axis: Stress time TimeList (LOG)
Y1 axis: Port1 terminal voltage Vport1List (LOG)
Y2 axis: Resistance RList (LINEAR)
Y3 axis: Difference from initial resistance DeltaRList (LINEAR)
Agilent EasyEXPERT Application Library Reference, Edition 8
11-42