Strasbaugh 6DS-SP, Operation Manual

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Operations Model 6DS-SP Planarizer
2 - 14 Version 4.0 - February 1998
The Bridge Assembly (1) encloses the Left and Right Spindle Drive
Assemblies (2 and 3) and travels linearly left or right between the Load
Stations (8 and 9) and the Polish Table (12) . In Figure
2-5, the bridge is shown positioned over the polish table.
The six defined positions for the bridge assembly are load, middle, polish, left
spindle curtain rinse (optional), right spindle curtain rinse (optional), second
table polish position (optional):
• At the load position the bridge aligns the left and right spindles to either
receive or deposit wafers at their respective
Load Stations (8 and 9) .
• The middle position is defined as the location at which the bridge
assembly rests between the load stations and the polish table, with the
left spindle drive assembly resting just to the right of the
Right Side
Load Station (9) .
• The polish position is defined as the point at which the bridge assembly
is centered over the polish table.
• The left spindle curtain rinse position places the bridge assembly
between the load stations and the polish table with the left spindle at the
optional curtain rinse .
• The right spindle curtain rinse position places the bridge assembly
between the load stations and the polish table with the right spindle at
the
optional curtain rinse .
• The second table polish position is the point at which the bridge
assembly is centered over the
optional second polish table (if installed).
The Pad Conditioning Device Assembly (4) conditions the polish table pad by
applying downward force while sweeping a rotating conditioning device across
the polish table from its middle to its circumference or from its circumference to
its middle. After completing table conditioning, the assembly parks itself away
from the polish table, just outside the circumference on the right-hand side.
The Elevator Assembly (5) positions cassettes for the robot to remove wafers
from the send cassettes and replace in the receive cassettes. If installed, the
optional scrubber assembly is mounted at the right receive elevator position.
(Refer to engineering drawing 225245E1 for the scrubber interface electrical
schematics),