Strasbaugh 6DS-SP, Operation Manual

Page: 1321 / 1562

STRASBAUGH, INC.
August 28, 1998 6DS-SP Software Ver 4.28 Page 5
Version 4.28 adds logging of polish abort data for up to 16 polish abort events. A polish
abort occurs anytime the 6DS-SP is halted or aborted during polishing. Halts can occur by
pressing the halt button, opening a door, or automatically from certain alarms. This logged
data can be used to help make reprocessing decisions without measuring the wafer.
The polish abort log is also saved on disk similar to the alarm log data. When the log is filled
with 16 polish abort events, the next event will cause the oldest event to be lost.
The following polish abort data are logged:
Current date
Current time
Lifetime wafer count
Polish step at the abort
Remaining step time at the abort (rounded to the nearest second)
Left wafer cassette number and slot number ("na" if left spindle not used)
Right wafer cassette number and slot number ("na" if right spindle not used)
New function key choices "Show Alarms" and "Show Aborts" permit viewing either the
alarm log or the polish abort log.
Polish abort logged data will appear as shown in the following examples:
"LT wfr" and "RT wfr" refer to the wafers' locations on the left and right spindles.
For 6DS-SP's with two send cassettes, cassette "1" is the left rear send cassette and cassette
"2" is the right rear send cassette. For 6DS-SP's with only one send cassette, it will be "1".
For the AGV option, the cassette number will be whatever was transferred from the AGV
sender ("1" through "4"). If the 6DS-SP's own send cassette was used, the cassette number
will be "1".
Carrier Loading Bridge Move Change:
06-19-98 20:21:18 Wfr: 126854
Aborted at step: 2 Remaining step time: 124 secs
LT wfr>Cass: 1 Slot: 21 RT wfr>Cass: 1 Slot: 22
06-05-98 08:15:02 Wfr: 115677
Aborted at step: 2 Remaining step time: 59 secs
LT wfr>Cass: 1 Slot: 7 RT wfr>Cass: na Slot: na