Strasbaugh 6DS-SP, Operation Manual

Page: 1096 / 1562

STRASBAUGH, INC.
May 31, 2001 (Ver 4.37) 6DS-SP User Interface Reference Page 23
SWEEP PARAMETERS MENU:
This menu permits setting parameters that determine how the programmable conditioning arm will sweep
across the table. (The Conditioning/Cleaning Parameters Menu has other conditioning choices.) If the
programmable arm is not installed, the Sweep Parameters menu will not show. Pages 1 and 2 have settings
for ex-situ and in-situ conditioning respectively. If the second conditioner option is installed, page 3 will
show with time settings but not force settings (force is by means of a fixed regulator).
F1 F2 F3 F8 F9 F10
Set Set Set to OTHER Sel
Abort/
Outer Inner Track Menu Reset
Engr. Engr. Engr. Password Permission
Maint. Maint. Maint.
Supvr. Supvr. Supvr.
12:00:00 SWEEP PARAMETERS 'Oper' SPNDL left right
PRIMARY TBL EX-SITU (or demand) CONDITIONING page 1 Frc .0 .0 psi
Seg- Time Force Seg- Time Force BkPr .0 .0
psig
ment (secs) (lbs) ment (secs) (lbs) Spd .0 .0 rpm
Load .0 .0
amps
(Outer position) TABLES 1 2
1 .0 .0 11 .0 .0 Spd .0 .0 rpm
2 .0 .0 12 .0 .0 Load .0
amps
3 .0 .0 13 .0 .0 Temp .0
degC
4 .0 .0 14 .0 .0 Cond .0 lbs
5 .0 .0 15 .0 .0 SLURRY 1 2
3
6 .0 .0 16 .0 .0 Flow .0 .0
.0
7 .0 .0 17 .0 .0 pH .0 .0
.0
8 .0 .0 18 .0 .0 COOLING WTR .0 gpm
9 .0 .0 19 .0 .0 I/O .0 .0
degC
10 .0 .0 20 .0 .0 LIFE Wafers
Time
(Inner position) 1-Pad 1 0 0h
0m
Outer position: .0 in. 2-Pad 2 0 0h
0m
Inner position: .0 in. Total sweep time: .0 3-L Carr 0 0h
0m
4-R Carr 0 0h