STRASBAUGH, INC.
May 31, 2001 (Ver 4.37)
6DS-SP User Interface Reference
Page 67
CALIBRATION/CONFIGURATION MENU:
This menu permits entry of values involved in machine calibration and configuration. Calibration includes
the various adjustments made by technicians (servo positions, force scale factors, etc.). Configuration
includes settings that either must be a certain way depending on machine options (second table installed,
etc.) or settings that are seldom changed (units of force measurement, etc.).
Many of the calibration variables have illegal value checking to prevent potentially damaging values.
A warning will show if an illegal entry has been made. Also, this menu will not permit changing bridge
calibration values if the spindles are not up. A warning will show if this is attempted.
A "jog" feature will jog the currently cursored variable by the currently set jog increment.
Smallr Jog
and
Larger Jog
set the jog increment.
JOG NEG
and
JOG POS
immediately perform the jog. The new
jogged value is subject to the same illegal value check as if it had been entered manually.
To help prevent accidental jogging, the
JOG NEG
and
JOG POS
choices are "guarded" (surrounded) by
the
Smallr Jog
and
Larger Jog
choices. This makes it harder to accidentally press the jogging choices
when merely wanting the nearby
Page Down
or
Sel Menu
choices.
12:00:00 CALIBRATION/CONFIGURATION 'Oper' SPNDL left right
page 1 Frc .0 .0 psi
1 Bridge home position 0 BkPr .0 .0
psig
2 Bridge load position 0 Spd .0 .0 rpm
3 Bridge table 1 position 0 Load .0 .0
amps
4 Bridge middle position 0 TABLES 1 2
5 TBL1 temp in span 0 Spd .0 .0 rpm
6 TBL1 temp out(or TBL2 in) span 0 Load .0
amps
7 TBL1 temp in zero 0 Temp .0
degC
8 TBL1 temp out(or TBL2 in) zero 0 Cond .0 lbs
9 Arm speed scale factor 0 SLURRY 1 2
3
10 Slurry 1 flow factor 0 Flow .0 .0
.0
11 Coolant flow scale factor 0 pH .0 .0
.0
12 Table 1 shunt low temp 0 COOLING WTR .0 gpm
13 Table 1 shunt high temp 0 I/O .0 .0
degC
14 Bridge left curtain position 0 LIFE Wafers
Time
15 Bridge right curtain position 0 1-Pad 1 0 0h
0m
16 Bridge table 2 position 0 2-Pad 2 0 0h
0m
3-L Carr 0 0h
0m
Current jog increment:
.001
.01 .1 1 10 100 4-R Carr 0 0h
Summary of Contents for 6DS-SP
Page 1: ......
Page 19: ...Introduction INTRODUCTION...
Page 58: ......
Page 59: ...Introduction ACHINE ESCRIPTION...
Page 108: ...Introduction PERATOR UNCTIONS...
Page 131: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 23 Figure 3 4 Menu Selection...
Page 134: ...Operations Model 6DS SP Planarizer 3 26 Version 4 0 February 1998 Figure 3 5 Home Machine Menu...
Page 145: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 37 Figure 3 8 Recipe Management Menu...
Page 150: ...Operations Model 6DS SP Planarizer 3 42 Version 4 0 February 1998 Figure 3 9 Home Machine Menu...
Page 203: ...Introduction ACHINE ETUP...
Page 210: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 7 Figure 4 2 Slurry Flush Menu...
Page 216: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 13 Figure 4 4 Polish Parameters Menu...
Page 254: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 51 Figure 4 13 Password Menu...
Page 258: ...Introduction TROUBLESHOOTING...
Page 267: ...Strasbaugh Troubleshooting Version 4 0 February 1998 5 9 Figure 13 1 Alarm Log Menu...
Page 326: ...Introduction APPENDICES...
Page 329: ...Introduction LECTRIAL NPUT UTPUT...
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Page 332: ......
Page 356: ...Introduction REVISIONS...
Page 357: ...Introduction INTRODUCTION...
Page 396: ......
Page 407: ...Strasbaugh Installation Version 4 0 February 1998 Update 11 06 01 2 11 U...
Page 421: ...Introduction HYSICAL ESCRIPTION...
Page 444: ...Introduction ECHANICAL ESCRIPTION...
Page 463: ...Introduction CONTROL SYSTEM DESCRIPTION...
Page 470: ...Introduction OWER ISTRIBUTION...
Page 479: ...Introduction LUMBING ESCRIPTION...
Page 490: ...Introduction REVENTATIVE AINTENANCE CHEDULES...
Page 507: ...Introduction ECHANICAL AINTENANCE ROCEDURES...
Page 516: ......
Page 691: ...Introduction OFTWARE ALIBRATION ROCEDURES...
Page 862: ...Introduction NEUMATIC DJUSTMENTS...
Page 897: ...Introduction OFTWARE ONTROL OMPUTER AINTENANCE...
Page 912: ...Introduction TROUBLESHOOTING...
Page 921: ...Strasbaugh Troubleshooting Version 4 0 February 1998 13 9 Figure 13 1 Alarm Log Menu...
Page 981: ......
Page 1005: ...Introduction APPENDICES...
Page 1006: ...Introduction ALIBRATION ARIABLES IST...
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Page 1094: ...STRASBAUGH INC May 31 2001 Ver 4 37 6DS SP User Interface Reference Page 21...
Page 1103: ...STRASBAUGH INC Page 30 6DS SP User Interface Reference May 31 2001 Ver 4 37...
Page 1467: ...Introduction SSEMBLY RAWINGS...
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Page 1470: ...Introduction ARTS IST...
Page 1471: ...Introduction LECTRICAL NPUT UTPUT...
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Page 1474: ...Introduction PTIONS...
Page 1476: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix D Options...
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Page 1478: ...Introduction AINTENANCE OG HEETS...
Page 1479: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix E Maintenance Log Sheets...
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Page 1508: ...Introduction APPENDICES...
Page 1509: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Manufacturer Data Attached CD...
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Page 1511: ......
Page 1534: ...Introduction APPENDICES...
Page 1535: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Part 2 Manufacturers Data Sheets...
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Page 1537: ......
Page 1560: ...Introduction APPENDICES...
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