Strasbaugh 6DS-SP, Operation Manual

Page: 1192 / 1562

STRASBAUGH, INC.
June 30, 2001 6DS-SP Software Ver 4.37.2 Page 10
Strasbaugh Confidential Information
Alarm if Cassette Arm Lifted During Wafer Fetch:
Version 4.37 adds an alarm if a send cassette's arm is lifted during a wafer fetch from the
cassette. An intermittent arm switch will also look like the arm is being lifted. This alarm
helps identify such a problem.
If the software detects the arm switch turned off (arm lifted or otherwise), the automatic cycle
will quit back to idle as it did before, but now the following alarm will show:
Alarm 222 "CASS ARM UP DURING WFR FETCH(abort clrs)"
This alarm is latched and requires and abort to clear it.
NOTE: There is one arm lift scenario where a different alarm condition will show. If the arm
is lifted which searching for the first slot, the special warning "OUT OF LIMIT ELEVATOR
MOVE!" may show. This is a special alarm that is not logged. The automatic cycle will be
stalled requiring an abort. One of the regular alarms such as "LEFT REAR ELEV NOT
ARRIVING AT SLOT" will probably also show. This situation occurs because an attempt is
made to raise the cassette to a point higher than its highest safe position. The first alarm
indicates the software is refusing the move because it can cause damage. The second alarm
occurs because the elevator has been prevented from moving. This alarm can be corrected
only by directly entering a permissable slot number into the relevant elevator axis slot
command counter (counters 30-33) or powering the machine off and back on.
Primary Table Inlet Cooling Water Temperature Alarm:
Version 4.37 adds a choice to have an alarm of the primary table inlet cooling water exceeds
limits. This is a steady alarm that will occur whether or not the machine is processing or in
dry idle. It will not show during wet idle.
The following calibration variables are used together:
241 "TBL1 coolant in LO limit(degC)
242 "TBL1 coolant in HI limit(degC)
There is one new alarm:
Miscellaneous alarm #224 "TBL1 COOLANT IN TEMPERATURE OUT OF RANGE"
To disable the alarm feature, set both variables to "0".
To enable the alarm feature, set both variables to non-zero values. Enter values in terms of
degrees centigrade regardless of the units used for display purposes.
Note: A higher priority alarm could prevent this alarm from showing until the higher priority
alarm is cleared, but any assigned alarm action will still occur as well as reporting to a GEM
host.