Strasbaugh 6DS-SP, Operation Manual

Page: 1178 / 1562

STRASBAUGH, INC.
November 9, 2001 6DS-SP Software Ver 4.38 Page 14
Strasbaugh Confidential Information
Miscellaneous Improvements:
A correction was made to solve the possibility that the software could appear to freeze when
polish doors were opened and then closed during wet idle.
Corrected a problem where the GEM “Process Complete” collection event was not reported
in some scenarios for 6DS-SP’s with the S-S high throughput configuration.
Corrected a problem where machines with only two cassettes might attempt to fill the elevator
tank at axis 6 even if calibration variable 180 “Dunk send (1-EN/0-DIS) RESET” was set for
disabled. Now, if this feature is disabled, the tank will not fill.
Made an improvement to prevent a nuisance “wafer not found on load station” alarm if the
machine is halted during the time robot arm swings over and lowers onto the load station.
Alarm checking will now begin only after the last robot move to deposit the wafer is
completed.
Made correction to the scrubber transfer and Nova transfer cycles where alarm 222 “Cass arm
up during wafer fetch (abort clears)” would show as a nuisance alarm after the last slot of a
cassette was used. (The possibility for this nuisance alarm occurred with version 4.37 and it
should not be seen on earlier versions.)
Made a correction to the scrubber transfer and Nova transfer wafer slot data handling where,
if using only the right spindle for polishing, incorrect slot data was transferred to the scrubber.
The correct data should now be transferred.