Strasbaugh 6DS-SP, Operation Manual

Page: 1355 / 1562

STRASBAUGH, INC.
October 3, 1997 6DS-SP Software Ver 4.24 Page 4
Pre-polish Robot Move:
Version 4.24 adds an optional pre-polish robot move. This move places the robot as far away
as possible from table slurries and sprays.
Calibration variable 91 "Pre-polish robot move(0-n,1-y)" enables this robot move.
If enabled, the robot will move to the Axis 5 position (a position nearest the elevator access
doors) immediately after the last wafer is placed on the load station.
If disabled, the robot will not make this move.
NOTE: This robot move may not be advantageous if using a high throughput option or Nova
system. This is because the robot may move to other stations during polishing to service high
throughput or Nova needs.
Light Tower Configuration #5 Change:
Version 4.24 changes the operation for light tower configuration #5 (set by calibration
variable 98).
The flashing yellow light now means a receive cassette is ready to be removed. Previously, it
meant any cassette was ready to be removed. There is no longer a light tower indication
when a send cassette is ready to be removed. The intended application is to replace the
receive cassette and its corresponding send cassette upon a flashing yellow light.
The complete light operation for configuration #5 is now:
Light on Light blink Light off
Green Processing (never) Idle
(In a cycle
running or
halted)
Red Alarm (never) No alarm
Yellow Port empty Receive All ports filled
cassette and being used
ready to
be removed
(Has priority
over "port empty")
Light Tower Configuration #6 Change: