STRASBAUGH, INC.
January 26, 1999
6DS-SP Software Ver 4.29.1
Page 10
More Recipes Can Be Displayed:
Version 4.29.1 permits displaying virtually any number of recipes in the Recipe Management
menu. (Previously, the maximum was 75 names.) Also, the total number of available recipes
will show and recipe names will be sorted alphanumerically. Finally, the "_" underscore
character can now be used in a recipe name.
New choices "Move Left" and "Move Right" allow easy sideways cursor movement between
columns. The cursor will also automatically move left or right after reaching the end of a
column when using "Move Up" and "Move Down" choices.
If there are more recipe names than can be shown on the screen, the notations "<MORE"
and/or "MORE>" will show near the top of the menu area.
"Store Recipe" and "Delete Recipe" are now on the "OTHER" row of choices. Also, new
choice "OK to Delete" has been added to confirm a recipe delete. The "OK to Delete" key
will have no effect unless the "Delete highlighted recipe ('OK to Delete'/ESC)" prompt is
showing. (Previously, this prompted a second press of the "Delete Recipe" choice.) "OK to
Delete" is also in a different function key position than any of the cursor movement choices
on the other function key row. These changes help prevent accidental deletes that might
otherwise occur if repeated cursor move attempts are made but the store/delete row of
function key choices is actually showing.
The new Recipe Management menu and its function key choices are shown below.
F1 F2 F6 F8 F9 F10
Store Delete OK to OTHER Sel
ABORT/
Recipe Recipe Delete Menu
RESET
00:00:00 Recipe Management 'Oper' SPNDL left right
Frc .0 .0 psi
7 Stored Recipes: BkPr .0 .0 psig
Spd .0 .0 rpm
COND1 Load .0 .0 amps
COND2 TABLES 1 2
PROC-100 Spd .0 .0 rpm
PROC-125 Load .0 amps
PROC-150 Temp .0 degC
TEST_1 Cond .0 psi
TEST_2 SLURRY 1 2
Flow .0 .0
pH .0 .0
COOLING WTR .0 gpm
I/O .0 .0 degC
LIFE Wafers Time
1-Pad 1 0 0h 0m
2-Pad 2 0 0h 0m
3-L Carr 0 0h 0m
4-R Carr 0 0h 0m
150 mm wfr
5-Primary Cond 0h 0m
Stat: Idle Rec PROC-150 Wfrs All Lifetime 0 0h
F1 F2 F3 F4 F5 F6 F7 F8 F9 F10
Move Move Move Move Get UpLoad DnLoad OTHER Sel
ABORT/
Up Down Left Right Recipe Recipe Recipe Menu
RESET
Summary of Contents for 6DS-SP
Page 1: ......
Page 19: ...Introduction INTRODUCTION...
Page 58: ......
Page 59: ...Introduction ACHINE ESCRIPTION...
Page 108: ...Introduction PERATOR UNCTIONS...
Page 131: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 23 Figure 3 4 Menu Selection...
Page 134: ...Operations Model 6DS SP Planarizer 3 26 Version 4 0 February 1998 Figure 3 5 Home Machine Menu...
Page 145: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 37 Figure 3 8 Recipe Management Menu...
Page 150: ...Operations Model 6DS SP Planarizer 3 42 Version 4 0 February 1998 Figure 3 9 Home Machine Menu...
Page 203: ...Introduction ACHINE ETUP...
Page 210: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 7 Figure 4 2 Slurry Flush Menu...
Page 216: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 13 Figure 4 4 Polish Parameters Menu...
Page 254: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 51 Figure 4 13 Password Menu...
Page 258: ...Introduction TROUBLESHOOTING...
Page 267: ...Strasbaugh Troubleshooting Version 4 0 February 1998 5 9 Figure 13 1 Alarm Log Menu...
Page 326: ...Introduction APPENDICES...
Page 329: ...Introduction LECTRIAL NPUT UTPUT...
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Page 332: ......
Page 356: ...Introduction REVISIONS...
Page 357: ...Introduction INTRODUCTION...
Page 396: ......
Page 407: ...Strasbaugh Installation Version 4 0 February 1998 Update 11 06 01 2 11 U...
Page 421: ...Introduction HYSICAL ESCRIPTION...
Page 444: ...Introduction ECHANICAL ESCRIPTION...
Page 463: ...Introduction CONTROL SYSTEM DESCRIPTION...
Page 470: ...Introduction OWER ISTRIBUTION...
Page 479: ...Introduction LUMBING ESCRIPTION...
Page 490: ...Introduction REVENTATIVE AINTENANCE CHEDULES...
Page 507: ...Introduction ECHANICAL AINTENANCE ROCEDURES...
Page 516: ......
Page 691: ...Introduction OFTWARE ALIBRATION ROCEDURES...
Page 862: ...Introduction NEUMATIC DJUSTMENTS...
Page 897: ...Introduction OFTWARE ONTROL OMPUTER AINTENANCE...
Page 912: ...Introduction TROUBLESHOOTING...
Page 921: ...Strasbaugh Troubleshooting Version 4 0 February 1998 13 9 Figure 13 1 Alarm Log Menu...
Page 981: ......
Page 1005: ...Introduction APPENDICES...
Page 1006: ...Introduction ALIBRATION ARIABLES IST...
Page 1008: ...Maintenance Model 6DS SP Planarizer This page intentionally left blank...
Page 1094: ...STRASBAUGH INC May 31 2001 Ver 4 37 6DS SP User Interface Reference Page 21...
Page 1103: ...STRASBAUGH INC Page 30 6DS SP User Interface Reference May 31 2001 Ver 4 37...
Page 1467: ...Introduction SSEMBLY RAWINGS...
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Page 1470: ...Introduction ARTS IST...
Page 1471: ...Introduction LECTRICAL NPUT UTPUT...
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Page 1474: ...Introduction PTIONS...
Page 1476: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix D Options...
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Page 1478: ...Introduction AINTENANCE OG HEETS...
Page 1479: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix E Maintenance Log Sheets...
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Page 1508: ...Introduction APPENDICES...
Page 1509: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Manufacturer Data Attached CD...
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Page 1511: ......
Page 1534: ...Introduction APPENDICES...
Page 1535: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Part 2 Manufacturers Data Sheets...
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Page 1537: ......
Page 1560: ...Introduction APPENDICES...
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