Strasbaugh 6DS-SP, Operation Manual

Page: 1420 / 1562

STRASBAUGH, INC.
April 8, 1996 6DS-SP Ver 4.17 Page 3
do the following:
- In the main menu, type
ALT+Q
(press the
ALT
and
Q
keys together).
This should cause the DOS prompt "
C:\QB45>
" to show.
2) Insert the "INSTALL DISK into the machine's disk drive.
3) Type:
”A:INSTALL 417”
and press
ENTER
- Files will automatically be copied from the disk to the machine.
- Remove the diskette when done.
4) Set the following calibration variables:
28 "Slurry 3 Present (0-no, 1-yes)"
Set to "1" if the third slurry system is installed. The variable must be
set to "0" if the third slurry system is not installed or if only the
"Pump 3" option is installed.
29 "Slry3 Alrm Inpt(0-N.O.,1-N.C.)"
Set to "0" if using slurry 3 "normally open" alarm contacts. Set to
"1" if using slurry 3 with "normally closed" alarm contacts.
95 "Show slurry 3 (0-no, 1-yes)"
Set to "1" if either the third slurry system or "Pump 3" option is
installed.
98 "Light tower config. (0,1,2,3)".
Set to the hardware configuration installed and desired lamp control.
If "0" or "1" is already entered and no change is desired, then don't
change this variable.
21 "Bridge mtd temp (0-no, 1-yes)"
Set to "1" if the machine has a bridge mounted temperature sensor.
Otherwise set to "0".
22 "Table 2 cooling (0-no, 1-yes)"
Set to "1" of the machine has the second table cooling option.
Otherwise set to "0".
135 "Robot up/dn bottom scrbr pos'n"
Calibrate this variable so that the robot end effector contacts a wafer
sitting in the scrubber arms.
Make sure variable 133 "Robot up/dn scrubber position" is calibrated
to place a wafer in the center of the scrubber arm slot.
73 "Lever arm balance force (lbs)"